6/16/2011	9:04:02 AM	Program exited cleanly
6/16/2011	9:15:55 AM	Recipe started at 9:15 AM
6/16/2011	9:15:55 AM	Helium valve closed
6/16/2011	9:15:55 AM	H2 valve closed
6/16/2011	9:15:55 AM	BCl3 valve closed
6/16/2011	9:15:55 AM	PH3 valve closed
6/16/2011	9:15:55 AM	SiCl4 pre valve closed
6/16/2011	9:15:55 AM	SiCl4 post valve closed
6/16/2011	9:15:55 AM	Main Vac valve closed
6/16/2011	9:15:55 AM	Bubbler valve closed
6/16/2011	9:15:55 AM	Bypass valve opened
6/16/2011	9:15:55 AM	Helium MFC set to  0.000000
6/16/2011	9:15:55 AM	H2 MFC set to  0.000000
6/16/2011	9:15:55 AM	BCl3 MFC set to  0.000000
6/16/2011	9:15:55 AM	PHl3 MFC set to  0.000000
6/16/2011	9:15:55 AM	SiCl4 MFC set to  0.000000
6/16/2011	9:15:55 AM	Bypass solenoid MFC set to  0.000000
6/16/2011	9:15:55 AM	Tube furnace set to 0
6/16/2011	9:15:55 AM	Helium valve closed
6/16/2011	9:15:55 AM	H2 valve closed
6/16/2011	9:15:55 AM	BCl3 valve closed
6/16/2011	9:15:55 AM	PH3 valve closed
6/16/2011	9:15:55 AM	SiCl4 pre valve closed
6/16/2011	9:15:55 AM	SiCl4 post valve closed
6/16/2011	9:15:55 AM	Bubbler valve closed
6/16/2011	9:15:55 AM	Main Vac valve opened
6/16/2011	9:15:55 AM	Bypass valve opened
6/16/2011	9:15:55 AM	Helium MFC set to  0.000000
6/16/2011	9:15:55 AM	H2 MFC set to  0.000000
6/16/2011	9:15:55 AM	BCl3 MFC set to  0.000000
6/16/2011	9:15:55 AM	PHl3 MFC set to  0.000000
6/16/2011	9:15:55 AM	SiCl4 MFC set to  0.000000
6/16/2011	9:15:55 AM	Bypass solenoid MFC set to  0.000000
6/16/2011	9:15:55 AM	Tube furnace set to 0
6/16/2011	9:15:56 AM	Run finished at 9:15 AM
6/16/2011	9:16:01 AM	Program started normally
6/16/2011	9:16:01 AM	Helium valve closed
6/16/2011	9:16:01 AM	H2 valve closed
6/16/2011	9:16:01 AM	BCl3 valve closed
6/16/2011	9:16:01 AM	PH3 valve closed
6/16/2011	9:16:01 AM	SiCl4 pre valve closed
6/16/2011	9:16:01 AM	SiCl4 post valve closed
6/16/2011	9:16:01 AM	Main Vac valve closed
6/16/2011	9:16:01 AM	Bypass valve closed
6/16/2011	9:16:01 AM	Bubbler valve closed
6/16/2011	9:16:01 AM	Helium MFC set to  0.000000
6/16/2011	9:16:01 AM	H2 MFC set to  0.000000
6/16/2011	9:16:01 AM	BCl3 MFC set to  0.000000
6/16/2011	9:16:01 AM	PHl3 MFC set to  0.000000
6/16/2011	9:16:01 AM	SiCl4 MFC set to  0.000000
6/16/2011	9:16:01 AM	Bypass solenoid MFC set to  760.000000
6/16/2011	9:16:01 AM	Tube furnace set to 0
6/16/2011	9:16:05 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/16/2011	9:16:05 AM	Recipe started at 9:16 AM
6/16/2011	9:16:05 AM	Helium valve closed
6/16/2011	9:16:05 AM	H2 valve closed
6/16/2011	9:16:05 AM	BCl3 valve closed
6/16/2011	9:16:05 AM	PH3 valve closed
6/16/2011	9:16:05 AM	SiCl4 pre valve closed
6/16/2011	9:16:05 AM	SiCl4 post valve closed
6/16/2011	9:16:05 AM	Main Vac valve closed
6/16/2011	9:16:05 AM	Bubbler valve closed
6/16/2011	9:16:05 AM	Bypass valve opened
6/16/2011	9:16:05 AM	Helium MFC set to  0.000000
6/16/2011	9:16:05 AM	H2 MFC set to  0.000000
6/16/2011	9:16:05 AM	BCl3 MFC set to  0.000000
6/16/2011	9:16:05 AM	PHl3 MFC set to  0.000000
6/16/2011	9:16:05 AM	SiCl4 MFC set to  0.000000
6/16/2011	9:16:05 AM	Bypass solenoid MFC set to  0.000000
6/16/2011	9:16:06 AM	Tube furnace set to 0
6/16/2011	9:16:06 AM	Helium valve closed
6/16/2011	9:16:06 AM	H2 valve closed
6/16/2011	9:16:06 AM	BCl3 valve closed
6/16/2011	9:16:06 AM	PH3 valve closed
6/16/2011	9:16:06 AM	SiCl4 pre valve closed
6/16/2011	9:16:06 AM	SiCl4 post valve closed
6/16/2011	9:16:06 AM	Bubbler valve closed
6/16/2011	9:16:06 AM	Main Vac valve opened
6/16/2011	9:16:06 AM	Bypass valve opened
6/16/2011	9:16:06 AM	Helium MFC set to  0.000000
6/16/2011	9:16:06 AM	H2 MFC set to  0.000000
6/16/2011	9:16:06 AM	BCl3 MFC set to  0.000000
6/16/2011	9:16:06 AM	PHl3 MFC set to  0.000000
6/16/2011	9:16:06 AM	SiCl4 MFC set to  0.000000
6/16/2011	9:16:06 AM	Bypass solenoid MFC set to  0.000000
6/16/2011	9:16:06 AM	Tube furnace set to 0
6/16/2011	9:16:06 AM	Run finished at 9:16 AM
6/16/2011	9:16:06 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/16/2011	9:16:10 AM	Program exited cleanly
6/16/2011	9:44:43 AM	Program started normally
6/16/2011	9:44:43 AM	Helium valve closed
6/16/2011	9:44:43 AM	H2 valve closed
6/16/2011	9:44:43 AM	BCl3 valve closed
6/16/2011	9:44:43 AM	PH3 valve closed
6/16/2011	9:44:43 AM	SiCl4 pre valve closed
6/16/2011	9:44:43 AM	SiCl4 post valve closed
6/16/2011	9:44:43 AM	Main Vac valve closed
6/16/2011	9:44:43 AM	Bypass valve closed
6/16/2011	9:44:43 AM	Bubbler valve closed
6/16/2011	9:44:43 AM	Helium MFC set to  0.000000
6/16/2011	9:44:43 AM	H2 MFC set to  0.000000
6/16/2011	9:44:43 AM	BCl3 MFC set to  0.000000
6/16/2011	9:44:43 AM	PHl3 MFC set to  0.000000
6/16/2011	9:44:43 AM	SiCl4 MFC set to  0.000000
6/16/2011	9:44:43 AM	Bypass solenoid MFC set to  760.000000
6/16/2011	9:44:43 AM	Tube furnace set to 0
6/16/2011	9:44:50 AM	Bypass valve opened
6/16/2011	9:44:51 AM	Main Vac valve opened
6/16/2011	9:46:49 AM	Recipe started at 9:46 AM
6/16/2011	9:46:49 AM	Helium valve closed
6/16/2011	9:46:49 AM	H2 valve closed
6/16/2011	9:46:49 AM	BCl3 valve closed
6/16/2011	9:46:49 AM	PH3 valve closed
6/16/2011	9:46:49 AM	SiCl4 pre valve closed
6/16/2011	9:46:49 AM	SiCl4 post valve closed
6/16/2011	9:46:49 AM	Bubbler valve closed
6/16/2011	9:46:49 AM	Main Vac valve opened
6/16/2011	9:46:49 AM	Bypass valve opened
6/16/2011	9:46:49 AM	Helium MFC set to  0.000000
6/16/2011	9:46:49 AM	H2 MFC set to  0.000000
6/16/2011	9:46:49 AM	BCl3 MFC set to  0.000000
6/16/2011	9:46:49 AM	PHl3 MFC set to  0.000000
6/16/2011	9:46:49 AM	SiCl4 MFC set to  0.000000
6/16/2011	9:46:49 AM	Bypass solenoid MFC set to  0.000000
6/16/2011	9:46:49 AM	Tube furnace set to 0
6/16/2011	9:46:49 AM	Helium valve closed
6/16/2011	9:46:49 AM	H2 valve closed
6/16/2011	9:46:49 AM	BCl3 valve closed
6/16/2011	9:46:49 AM	PH3 valve closed
6/16/2011	9:46:49 AM	SiCl4 pre valve closed
6/16/2011	9:46:49 AM	SiCl4 post valve closed
6/16/2011	9:46:49 AM	Bubbler valve closed
6/16/2011	9:46:49 AM	Main Vac valve opened
6/16/2011	9:46:49 AM	Bypass valve opened
6/16/2011	9:46:49 AM	Helium MFC set to  0.000000
6/16/2011	9:46:49 AM	H2 MFC set to  0.000000
6/16/2011	9:46:49 AM	BCl3 MFC set to  0.000000
6/16/2011	9:46:49 AM	PHl3 MFC set to  0.000000
6/16/2011	9:46:49 AM	SiCl4 MFC set to  0.000000
6/16/2011	9:46:49 AM	Bypass solenoid MFC set to  0.000000
6/16/2011	9:46:49 AM	Tube furnace set to 200
6/16/2011	9:51:49 AM	Helium valve closed
6/16/2011	9:51:49 AM	H2 valve closed
6/16/2011	9:51:49 AM	BCl3 valve closed
6/16/2011	9:51:49 AM	PH3 valve closed
6/16/2011	9:51:49 AM	SiCl4 pre valve closed
6/16/2011	9:51:49 AM	SiCl4 post valve closed
6/16/2011	9:51:49 AM	Bubbler valve closed
6/16/2011	9:51:49 AM	Main Vac valve opened
6/16/2011	9:51:49 AM	Bypass valve opened
6/16/2011	9:51:49 AM	Helium MFC set to  0.000000
6/16/2011	9:51:49 AM	H2 MFC set to  0.000000
6/16/2011	9:51:49 AM	BCl3 MFC set to  0.000000
6/16/2011	9:51:49 AM	PHl3 MFC set to  0.000000
6/16/2011	9:51:49 AM	SiCl4 MFC set to  0.000000
6/16/2011	9:51:49 AM	Bypass solenoid MFC set to  0.000000
6/16/2011	9:51:49 AM	Tube furnace set to 0
6/16/2011	9:56:49 AM	Run finished at 9:56 AM
6/16/2011	10:04:16 AM	Program exited cleanly
6/16/2011	10:27:08 AM	Program started normally
6/16/2011	10:27:08 AM	Helium valve closed
6/16/2011	10:27:08 AM	H2 valve closed
6/16/2011	10:27:08 AM	BCl3 valve closed
6/16/2011	10:27:08 AM	PH3 valve closed
6/16/2011	10:27:08 AM	SiCl4 pre valve closed
6/16/2011	10:27:08 AM	SiCl4 post valve closed
6/16/2011	10:27:08 AM	Main Vac valve closed
6/16/2011	10:27:08 AM	Bypass valve closed
6/16/2011	10:27:08 AM	Bubbler valve closed
6/16/2011	10:27:08 AM	Helium MFC set to  0.000000
6/16/2011	10:27:08 AM	H2 MFC set to  0.000000
6/16/2011	10:27:08 AM	BCl3 MFC set to  0.000000
6/16/2011	10:27:08 AM	PHl3 MFC set to  0.000000
6/16/2011	10:27:08 AM	SiCl4 MFC set to  0.000000
6/16/2011	10:27:08 AM	Bypass solenoid MFC set to  760.000000
6/16/2011	10:27:09 AM	Tube furnace set to 0
6/16/2011	10:27:42 AM	Recipe started at 10:27 AM
6/16/2011	10:27:42 AM	Helium valve closed
6/16/2011	10:27:42 AM	H2 valve closed
6/16/2011	10:27:42 AM	BCl3 valve closed
6/16/2011	10:27:42 AM	PH3 valve closed
6/16/2011	10:27:42 AM	SiCl4 pre valve closed
6/16/2011	10:27:42 AM	SiCl4 post valve closed
6/16/2011	10:27:42 AM	Bubbler valve closed
6/16/2011	10:27:42 AM	Main Vac valve opened
6/16/2011	10:27:42 AM	Bypass valve opened
6/16/2011	10:27:42 AM	Helium MFC set to  0.000000
6/16/2011	10:27:42 AM	H2 MFC set to  0.000000
6/16/2011	10:27:42 AM	BCl3 MFC set to  0.000000
6/16/2011	10:27:42 AM	PHl3 MFC set to  0.000000
6/16/2011	10:27:42 AM	SiCl4 MFC set to  0.000000
6/16/2011	10:27:42 AM	Bypass solenoid MFC set to  0.000000
6/16/2011	10:27:42 AM	Tube furnace set to 0
6/16/2011	10:27:42 AM	Helium valve closed
6/16/2011	10:27:42 AM	H2 valve closed
6/16/2011	10:27:42 AM	BCl3 valve closed
6/16/2011	10:27:42 AM	PH3 valve closed
6/16/2011	10:27:42 AM	SiCl4 pre valve closed
6/16/2011	10:27:42 AM	SiCl4 post valve closed
6/16/2011	10:27:42 AM	Bubbler valve closed
6/16/2011	10:27:42 AM	Main Vac valve opened
6/16/2011	10:27:42 AM	Bypass valve opened
6/16/2011	10:27:42 AM	Helium MFC set to  0.000000
6/16/2011	10:27:42 AM	H2 MFC set to  0.000000
6/16/2011	10:27:42 AM	BCl3 MFC set to  0.000000
6/16/2011	10:27:42 AM	PHl3 MFC set to  0.000000
6/16/2011	10:27:42 AM	SiCl4 MFC set to  0.000000
6/16/2011	10:27:42 AM	Bypass solenoid MFC set to  0.000000
6/16/2011	10:27:43 AM	Tube furnace set to 200
6/16/2011	10:32:43 AM	Helium valve closed
6/16/2011	10:32:43 AM	H2 valve closed
6/16/2011	10:32:43 AM	BCl3 valve closed
6/16/2011	10:32:43 AM	PH3 valve closed
6/16/2011	10:32:43 AM	SiCl4 pre valve closed
6/16/2011	10:32:43 AM	SiCl4 post valve closed
6/16/2011	10:32:43 AM	Bubbler valve closed
6/16/2011	10:32:43 AM	Main Vac valve opened
6/16/2011	10:32:43 AM	Bypass valve opened
6/16/2011	10:32:43 AM	Helium MFC set to  0.000000
6/16/2011	10:32:43 AM	H2 MFC set to  0.000000
6/16/2011	10:32:43 AM	BCl3 MFC set to  0.000000
6/16/2011	10:32:43 AM	PHl3 MFC set to  0.000000
6/16/2011	10:32:43 AM	SiCl4 MFC set to  0.000000
6/16/2011	10:32:43 AM	Bypass solenoid MFC set to  0.000000
6/16/2011	10:32:43 AM	Tube furnace set to 0
6/16/2011	10:34:17 AM	Run aborted at 10:34 AM
6/16/2011	10:34:17 AM	Helium valve closed
6/16/2011	10:34:17 AM	H2 valve closed
6/16/2011	10:34:17 AM	BCl3 valve closed
6/16/2011	10:34:17 AM	PH3 valve closed
6/16/2011	10:34:18 AM	SiCl4 pre valve closed
6/16/2011	10:34:18 AM	SiCl4 post valve closed
6/16/2011	10:34:18 AM	Bypass valve closed
6/16/2011	10:34:18 AM	Main Vac valve closed
6/16/2011	10:34:18 AM	Bubbler valve closed
6/16/2011	10:34:18 AM	Helium MFC set to  0.000000
6/16/2011	10:34:18 AM	H2 MFC set to  0.000000
6/16/2011	10:34:18 AM	BCl3 MFC set to  0.000000
6/16/2011	10:34:18 AM	PHl3 MFC set to  0.000000
6/16/2011	10:34:18 AM	SiCl4 MFC set to  0.000000
6/16/2011	10:34:18 AM	Tube furnace set to 0
6/16/2011	10:35:40 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/16/2011	10:35:40 AM	Recipe started at 10:35 AM
6/16/2011	10:35:40 AM	H2 valve closed
6/16/2011	10:35:40 AM	BCl3 valve closed
6/16/2011	10:35:40 AM	PH3 valve closed
6/16/2011	10:35:40 AM	SiCl4 pre valve closed
6/16/2011	10:35:40 AM	SiCl4 post valve closed
6/16/2011	10:35:40 AM	Main Vac valve closed
6/16/2011	10:35:40 AM	Bypass valve closed
6/16/2011	10:35:40 AM	Bubbler valve closed
6/16/2011	10:35:40 AM	Helium valve opened
6/16/2011	10:35:40 AM	Helium MFC set to  500.000000
6/16/2011	10:35:40 AM	H2 MFC set to  0.000000
6/16/2011	10:35:40 AM	BCl3 MFC set to  0.000000
6/16/2011	10:35:40 AM	PHl3 MFC set to  0.000000
6/16/2011	10:35:40 AM	SiCl4 MFC set to  0.000000
6/16/2011	10:35:40 AM	Bypass solenoid MFC set to  0.000000
6/16/2011	10:35:41 AM	Tube furnace set to 0
6/16/2011	10:36:56 AM	Helium valve closed
6/16/2011	10:36:56 AM	H2 valve closed
6/16/2011	10:36:56 AM	BCl3 valve closed
6/16/2011	10:36:56 AM	PH3 valve closed
6/16/2011	10:36:56 AM	SiCl4 pre valve closed
6/16/2011	10:36:56 AM	SiCl4 post valve closed
6/16/2011	10:36:56 AM	Main Vac valve closed
6/16/2011	10:36:56 AM	Bypass valve closed
6/16/2011	10:36:56 AM	Bubbler valve closed
6/16/2011	10:36:56 AM	Helium MFC set to  0.000000
6/16/2011	10:36:56 AM	H2 MFC set to  0.000000
6/16/2011	10:36:56 AM	BCl3 MFC set to  0.000000
6/16/2011	10:36:56 AM	PHl3 MFC set to  0.000000
6/16/2011	10:36:56 AM	SiCl4 MFC set to  0.000000
6/16/2011	10:36:56 AM	Bypass solenoid MFC set to  0.000000
6/16/2011	10:36:56 AM	Tube furnace set to 0
6/16/2011	10:36:56 AM	Run finished at 10:36 AM
6/16/2011	10:37:05 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/16/2011	10:37:22 AM	Program exited cleanly
6/16/2011	10:39:06 AM	Program started normally
6/16/2011	10:39:06 AM	Helium valve closed
6/16/2011	10:39:06 AM	H2 valve closed
6/16/2011	10:39:06 AM	BCl3 valve closed
6/16/2011	10:39:06 AM	PH3 valve closed
6/16/2011	10:39:06 AM	SiCl4 pre valve closed
6/16/2011	10:39:06 AM	SiCl4 post valve closed
6/16/2011	10:39:06 AM	Main Vac valve closed
6/16/2011	10:39:06 AM	Bypass valve closed
6/16/2011	10:39:06 AM	Bubbler valve closed
6/16/2011	10:39:06 AM	Helium MFC set to  0.000000
6/16/2011	10:39:06 AM	H2 MFC set to  0.000000
6/16/2011	10:39:06 AM	BCl3 MFC set to  0.000000
6/16/2011	10:39:06 AM	PHl3 MFC set to  0.000000
6/16/2011	10:39:06 AM	SiCl4 MFC set to  0.000000
6/16/2011	10:39:06 AM	Bypass solenoid MFC set to  760.000000
6/16/2011	10:39:06 AM	Tube furnace set to 0
6/16/2011	10:39:08 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/16/2011	10:39:09 AM	Recipe started at 10:39 AM
6/16/2011	10:39:09 AM	Helium valve closed
6/16/2011	10:39:09 AM	H2 valve closed
6/16/2011	10:39:09 AM	BCl3 valve closed
6/16/2011	10:39:09 AM	PH3 valve closed
6/16/2011	10:39:09 AM	SiCl4 pre valve closed
6/16/2011	10:39:09 AM	SiCl4 post valve closed
6/16/2011	10:39:09 AM	Main Vac valve closed
6/16/2011	10:39:09 AM	Bubbler valve closed
6/16/2011	10:39:09 AM	Bypass valve opened
6/16/2011	10:39:09 AM	Helium MFC set to  0.000000
6/16/2011	10:39:09 AM	H2 MFC set to  0.000000
6/16/2011	10:39:09 AM	BCl3 MFC set to  0.000000
6/16/2011	10:39:09 AM	PHl3 MFC set to  0.000000
6/16/2011	10:39:09 AM	SiCl4 MFC set to  0.000000
6/16/2011	10:39:09 AM	Bypass solenoid MFC set to  0.000000
6/16/2011	10:39:09 AM	Tube furnace set to 0
6/16/2011	10:39:32 AM	Helium valve closed
6/16/2011	10:39:32 AM	H2 valve closed
6/16/2011	10:39:32 AM	BCl3 valve closed
6/16/2011	10:39:32 AM	PH3 valve closed
6/16/2011	10:39:32 AM	SiCl4 pre valve closed
6/16/2011	10:39:32 AM	SiCl4 post valve closed
6/16/2011	10:39:32 AM	Bubbler valve closed
6/16/2011	10:39:32 AM	Main Vac valve opened
6/16/2011	10:39:32 AM	Bypass valve opened
6/16/2011	10:39:32 AM	Helium MFC set to  0.000000
6/16/2011	10:39:32 AM	H2 MFC set to  0.000000
6/16/2011	10:39:32 AM	BCl3 MFC set to  0.000000
6/16/2011	10:39:32 AM	PHl3 MFC set to  0.000000
6/16/2011	10:39:32 AM	SiCl4 MFC set to  0.000000
6/16/2011	10:39:32 AM	Bypass solenoid MFC set to  0.000000
6/16/2011	10:39:32 AM	Tube furnace set to 0
6/16/2011	10:39:32 AM	Run finished at 10:39 AM
6/16/2011	10:39:32 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/16/2011	10:39:37 AM	Program exited cleanly
6/16/2011	10:40:24 AM	Program started normally
6/16/2011	10:40:24 AM	Helium valve closed
6/16/2011	10:40:24 AM	H2 valve closed
6/16/2011	10:40:24 AM	BCl3 valve closed
6/16/2011	10:40:24 AM	PH3 valve closed
6/16/2011	10:40:24 AM	SiCl4 pre valve closed
6/16/2011	10:40:24 AM	SiCl4 post valve closed
6/16/2011	10:40:24 AM	Main Vac valve closed
6/16/2011	10:40:24 AM	Bypass valve closed
6/16/2011	10:40:24 AM	Bubbler valve closed
6/16/2011	10:40:24 AM	Helium MFC set to  0.000000
6/16/2011	10:40:24 AM	H2 MFC set to  0.000000
6/16/2011	10:40:24 AM	BCl3 MFC set to  0.000000
6/16/2011	10:40:24 AM	PHl3 MFC set to  0.000000
6/16/2011	10:40:24 AM	SiCl4 MFC set to  0.000000
6/16/2011	10:40:24 AM	Bypass solenoid MFC set to  760.000000
6/16/2011	10:40:24 AM	Tube furnace set to 0
6/16/2011	10:40:27 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/16/2011	10:40:28 AM	Recipe started at 10:40 AM
6/16/2011	10:40:28 AM	H2 valve closed
6/16/2011	10:40:28 AM	BCl3 valve closed
6/16/2011	10:40:28 AM	PH3 valve closed
6/16/2011	10:40:28 AM	SiCl4 pre valve closed
6/16/2011	10:40:28 AM	SiCl4 post valve closed
6/16/2011	10:40:28 AM	Main Vac valve closed
6/16/2011	10:40:28 AM	Bypass valve closed
6/16/2011	10:40:28 AM	Bubbler valve closed
6/16/2011	10:40:28 AM	Helium valve opened
6/16/2011	10:40:28 AM	Helium MFC set to  500.000000
6/16/2011	10:40:28 AM	H2 MFC set to  0.000000
6/16/2011	10:40:28 AM	BCl3 MFC set to  0.000000
6/16/2011	10:40:28 AM	PHl3 MFC set to  0.000000
6/16/2011	10:40:28 AM	SiCl4 MFC set to  0.000000
6/16/2011	10:40:28 AM	Bypass solenoid MFC set to  0.000000
6/16/2011	10:40:28 AM	Tube furnace set to 0
6/16/2011	10:40:35 AM	Run aborted at 10:40 AM
6/16/2011	10:40:35 AM	Helium valve closed
6/16/2011	10:40:35 AM	H2 valve closed
6/16/2011	10:40:35 AM	BCl3 valve closed
6/16/2011	10:40:35 AM	PH3 valve closed
6/16/2011	10:40:35 AM	SiCl4 pre valve closed
6/16/2011	10:40:35 AM	SiCl4 post valve closed
6/16/2011	10:40:35 AM	Bypass valve closed
6/16/2011	10:40:35 AM	Main Vac valve closed
6/16/2011	10:40:35 AM	Bubbler valve closed
6/16/2011	10:40:35 AM	Helium MFC set to  0.000000
6/16/2011	10:40:35 AM	H2 MFC set to  0.000000
6/16/2011	10:40:35 AM	BCl3 MFC set to  0.000000
6/16/2011	10:40:35 AM	PHl3 MFC set to  0.000000
6/16/2011	10:40:35 AM	SiCl4 MFC set to  0.000000
6/16/2011	10:40:35 AM	Tube furnace set to 0
6/16/2011	10:40:35 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/16/2011	10:40:40 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/16/2011	10:40:40 AM	Recipe started at 10:40 AM
6/16/2011	10:40:40 AM	Helium valve closed
6/16/2011	10:40:40 AM	H2 valve closed
6/16/2011	10:40:40 AM	BCl3 valve closed
6/16/2011	10:40:40 AM	PH3 valve closed
6/16/2011	10:40:40 AM	SiCl4 pre valve closed
6/16/2011	10:40:40 AM	SiCl4 post valve closed
6/16/2011	10:40:40 AM	Main Vac valve closed
6/16/2011	10:40:40 AM	Bubbler valve closed
6/16/2011	10:40:40 AM	Bypass valve opened
6/16/2011	10:40:40 AM	Helium MFC set to  0.000000
6/16/2011	10:40:40 AM	H2 MFC set to  0.000000
6/16/2011	10:40:40 AM	BCl3 MFC set to  0.000000
6/16/2011	10:40:40 AM	PHl3 MFC set to  0.000000
6/16/2011	10:40:40 AM	SiCl4 MFC set to  0.000000
6/16/2011	10:40:40 AM	Bypass solenoid MFC set to  0.000000
6/16/2011	10:40:41 AM	Tube furnace set to 0
6/16/2011	10:40:46 AM	Helium valve closed
6/16/2011	10:40:46 AM	H2 valve closed
6/16/2011	10:40:46 AM	BCl3 valve closed
6/16/2011	10:40:46 AM	PH3 valve closed
6/16/2011	10:40:46 AM	SiCl4 pre valve closed
6/16/2011	10:40:46 AM	SiCl4 post valve closed
6/16/2011	10:40:46 AM	Bubbler valve closed
6/16/2011	10:40:46 AM	Main Vac valve opened
6/16/2011	10:40:46 AM	Bypass valve opened
6/16/2011	10:40:46 AM	Helium MFC set to  0.000000
6/16/2011	10:40:46 AM	H2 MFC set to  0.000000
6/16/2011	10:40:46 AM	BCl3 MFC set to  0.000000
6/16/2011	10:40:46 AM	PHl3 MFC set to  0.000000
6/16/2011	10:40:46 AM	SiCl4 MFC set to  0.000000
6/16/2011	10:40:46 AM	Bypass solenoid MFC set to  0.000000
6/16/2011	10:40:46 AM	Tube furnace set to 0
6/16/2011	10:40:46 AM	Run finished at 10:40 AM
6/16/2011	10:40:46 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/16/2011	10:43:46 AM	Program exited cleanly
6/16/2011	10:44:11 AM	Program started normally
6/16/2011	10:44:11 AM	Helium valve closed
6/16/2011	10:44:11 AM	H2 valve closed
6/16/2011	10:44:11 AM	BCl3 valve closed
6/16/2011	10:44:11 AM	PH3 valve closed
6/16/2011	10:44:11 AM	SiCl4 pre valve closed
6/16/2011	10:44:11 AM	SiCl4 post valve closed
6/16/2011	10:44:11 AM	Main Vac valve closed
6/16/2011	10:44:11 AM	Bypass valve closed
6/16/2011	10:44:11 AM	Bubbler valve closed
6/16/2011	10:44:11 AM	Helium MFC set to  0.000000
6/16/2011	10:44:11 AM	H2 MFC set to  0.000000
6/16/2011	10:44:11 AM	BCl3 MFC set to  0.000000
6/16/2011	10:44:11 AM	PHl3 MFC set to  0.000000
6/16/2011	10:44:11 AM	SiCl4 MFC set to  0.000000
6/16/2011	10:44:11 AM	Bypass solenoid MFC set to  760.000000
6/16/2011	10:44:11 AM	Tube furnace set to 0
6/16/2011	10:44:15 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/16/2011	10:44:15 AM	Recipe started at 10:44 AM
6/16/2011	10:44:15 AM	Helium valve closed
6/16/2011	10:44:15 AM	H2 valve closed
6/16/2011	10:44:15 AM	BCl3 valve closed
6/16/2011	10:44:16 AM	PH3 valve closed
6/16/2011	10:44:16 AM	SiCl4 pre valve closed
6/16/2011	10:44:16 AM	SiCl4 post valve closed
6/16/2011	10:44:16 AM	Main Vac valve closed
6/16/2011	10:44:16 AM	Bubbler valve closed
6/16/2011	10:44:16 AM	Bypass valve opened
6/16/2011	10:44:16 AM	Helium MFC set to  0.000000
6/16/2011	10:44:16 AM	H2 MFC set to  0.000000
6/16/2011	10:44:16 AM	BCl3 MFC set to  0.000000
6/16/2011	10:44:16 AM	PHl3 MFC set to  0.000000
6/16/2011	10:44:16 AM	SiCl4 MFC set to  0.000000
6/16/2011	10:44:16 AM	Bypass solenoid MFC set to  0.000000
6/16/2011	10:44:16 AM	Tube furnace set to 0
6/16/2011	10:44:16 AM	Helium valve closed
6/16/2011	10:44:16 AM	H2 valve closed
6/16/2011	10:44:16 AM	BCl3 valve closed
6/16/2011	10:44:16 AM	PH3 valve closed
6/16/2011	10:44:16 AM	SiCl4 pre valve closed
6/16/2011	10:44:16 AM	SiCl4 post valve closed
6/16/2011	10:44:16 AM	Bubbler valve closed
6/16/2011	10:44:16 AM	Main Vac valve opened
6/16/2011	10:44:16 AM	Bypass valve opened
6/16/2011	10:44:16 AM	Helium MFC set to  0.000000
6/16/2011	10:44:16 AM	H2 MFC set to  0.000000
6/16/2011	10:44:16 AM	BCl3 MFC set to  0.000000
6/16/2011	10:44:16 AM	PHl3 MFC set to  0.000000
6/16/2011	10:44:16 AM	SiCl4 MFC set to  0.000000
6/16/2011	10:44:16 AM	Bypass solenoid MFC set to  0.000000
6/16/2011	10:44:16 AM	Tube furnace set to 0
6/16/2011	10:44:16 AM	Run finished at 10:44 AM
6/16/2011	10:44:16 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/16/2011	10:44:19 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/16/2011	10:44:20 AM	Recipe started at 10:44 AM
6/16/2011	10:44:20 AM	H2 valve closed
6/16/2011	10:44:20 AM	BCl3 valve closed
6/16/2011	10:44:20 AM	PH3 valve closed
6/16/2011	10:44:20 AM	SiCl4 pre valve closed
6/16/2011	10:44:20 AM	SiCl4 post valve closed
6/16/2011	10:44:20 AM	Main Vac valve closed
6/16/2011	10:44:20 AM	Bypass valve closed
6/16/2011	10:44:20 AM	Bubbler valve closed
6/16/2011	10:44:20 AM	Helium valve opened
6/16/2011	10:44:20 AM	Helium MFC set to  500.000000
6/16/2011	10:44:20 AM	H2 MFC set to  0.000000
6/16/2011	10:44:20 AM	BCl3 MFC set to  0.000000
6/16/2011	10:44:20 AM	PHl3 MFC set to  0.000000
6/16/2011	10:44:20 AM	SiCl4 MFC set to  0.000000
6/16/2011	10:44:20 AM	Bypass solenoid MFC set to  0.000000
6/16/2011	10:44:20 AM	Tube furnace set to 0
6/16/2011	10:45:12 AM	Run aborted at 10:45 AM
6/16/2011	10:45:12 AM	Helium valve closed
6/16/2011	10:45:12 AM	H2 valve closed
6/16/2011	10:45:12 AM	BCl3 valve closed
6/16/2011	10:45:12 AM	PH3 valve closed
6/16/2011	10:45:12 AM	SiCl4 pre valve closed
6/16/2011	10:45:12 AM	SiCl4 post valve closed
6/16/2011	10:45:12 AM	Bypass valve closed
6/16/2011	10:45:12 AM	Main Vac valve closed
6/16/2011	10:45:12 AM	Bubbler valve closed
6/16/2011	10:45:12 AM	Helium MFC set to  0.000000
6/16/2011	10:45:12 AM	H2 MFC set to  0.000000
6/16/2011	10:45:12 AM	BCl3 MFC set to  0.000000
6/16/2011	10:45:12 AM	PHl3 MFC set to  0.000000
6/16/2011	10:45:12 AM	SiCl4 MFC set to  0.000000
6/16/2011	10:45:12 AM	Tube furnace set to 0
6/16/2011	10:45:12 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/16/2011	10:45:15 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/16/2011	10:45:16 AM	Recipe started at 10:45 AM
6/16/2011	10:45:16 AM	Helium valve closed
6/16/2011	10:45:16 AM	H2 valve closed
6/16/2011	10:45:16 AM	BCl3 valve closed
6/16/2011	10:45:16 AM	PH3 valve closed
6/16/2011	10:45:16 AM	SiCl4 pre valve closed
6/16/2011	10:45:16 AM	SiCl4 post valve closed
6/16/2011	10:45:16 AM	Main Vac valve closed
6/16/2011	10:45:16 AM	Bubbler valve closed
6/16/2011	10:45:16 AM	Bypass valve opened
6/16/2011	10:45:16 AM	Helium MFC set to  0.000000
6/16/2011	10:45:16 AM	H2 MFC set to  0.000000
6/16/2011	10:45:16 AM	BCl3 MFC set to  0.000000
6/16/2011	10:45:16 AM	PHl3 MFC set to  0.000000
6/16/2011	10:45:16 AM	SiCl4 MFC set to  0.000000
6/16/2011	10:45:16 AM	Bypass solenoid MFC set to  0.000000
6/16/2011	10:45:16 AM	Tube furnace set to 0
6/16/2011	10:45:37 AM	Helium valve closed
6/16/2011	10:45:37 AM	H2 valve closed
6/16/2011	10:45:37 AM	BCl3 valve closed
6/16/2011	10:45:37 AM	PH3 valve closed
6/16/2011	10:45:37 AM	SiCl4 pre valve closed
6/16/2011	10:45:37 AM	SiCl4 post valve closed
6/16/2011	10:45:37 AM	Bubbler valve closed
6/16/2011	10:45:37 AM	Main Vac valve opened
6/16/2011	10:45:37 AM	Bypass valve opened
6/16/2011	10:45:37 AM	Helium MFC set to  0.000000
6/16/2011	10:45:37 AM	H2 MFC set to  0.000000
6/16/2011	10:45:37 AM	BCl3 MFC set to  0.000000
6/16/2011	10:45:37 AM	PHl3 MFC set to  0.000000
6/16/2011	10:45:37 AM	SiCl4 MFC set to  0.000000
6/16/2011	10:45:37 AM	Bypass solenoid MFC set to  0.000000
6/16/2011	10:45:37 AM	Tube furnace set to 0
6/16/2011	10:45:37 AM	Run finished at 10:45 AM
6/16/2011	10:45:37 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/16/2011	10:46:20 AM	Program exited cleanly
6/16/2011	10:50:41 AM	Program started normally
6/16/2011	10:50:41 AM	Helium valve closed
6/16/2011	10:50:41 AM	H2 valve closed
6/16/2011	10:50:41 AM	BCl3 valve closed
6/16/2011	10:50:41 AM	PH3 valve closed
6/16/2011	10:50:41 AM	SiCl4 pre valve closed
6/16/2011	10:50:41 AM	SiCl4 post valve closed
6/16/2011	10:50:41 AM	Main Vac valve closed
6/16/2011	10:50:41 AM	Bypass valve closed
6/16/2011	10:50:41 AM	Bubbler valve closed
6/16/2011	10:50:41 AM	Helium MFC set to  0.000000
6/16/2011	10:50:41 AM	H2 MFC set to  0.000000
6/16/2011	10:50:41 AM	BCl3 MFC set to  0.000000
6/16/2011	10:50:41 AM	PHl3 MFC set to  0.000000
6/16/2011	10:50:41 AM	SiCl4 MFC set to  0.000000
6/16/2011	10:50:41 AM	Bypass solenoid MFC set to  760.000000
6/16/2011	10:50:41 AM	Tube furnace set to 0
6/16/2011	10:50:45 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/16/2011	10:50:46 AM	Recipe started at 10:50 AM
6/16/2011	10:50:46 AM	H2 valve closed
6/16/2011	10:50:46 AM	BCl3 valve closed
6/16/2011	10:50:46 AM	PH3 valve closed
6/16/2011	10:50:46 AM	SiCl4 pre valve closed
6/16/2011	10:50:46 AM	SiCl4 post valve closed
6/16/2011	10:50:46 AM	Main Vac valve closed
6/16/2011	10:50:46 AM	Bypass valve closed
6/16/2011	10:50:46 AM	Bubbler valve closed
6/16/2011	10:50:46 AM	Helium valve opened
6/16/2011	10:50:46 AM	Helium MFC set to  500.000000
6/16/2011	10:50:46 AM	H2 MFC set to  0.000000
6/16/2011	10:50:46 AM	BCl3 MFC set to  0.000000
6/16/2011	10:50:46 AM	PHl3 MFC set to  0.000000
6/16/2011	10:50:46 AM	SiCl4 MFC set to  0.000000
6/16/2011	10:50:46 AM	Bypass solenoid MFC set to  0.000000
6/16/2011	10:50:46 AM	Tube furnace set to 0
6/16/2011	10:50:57 AM	Run aborted at 10:50 AM
6/16/2011	10:50:57 AM	Helium valve closed
6/16/2011	10:50:57 AM	H2 valve closed
6/16/2011	10:50:57 AM	BCl3 valve closed
6/16/2011	10:50:57 AM	PH3 valve closed
6/16/2011	10:50:57 AM	SiCl4 pre valve closed
6/16/2011	10:50:57 AM	SiCl4 post valve closed
6/16/2011	10:50:57 AM	Bypass valve closed
6/16/2011	10:50:57 AM	Main Vac valve closed
6/16/2011	10:50:57 AM	Bubbler valve closed
6/16/2011	10:50:57 AM	Helium MFC set to  0.000000
6/16/2011	10:50:57 AM	H2 MFC set to  0.000000
6/16/2011	10:50:57 AM	BCl3 MFC set to  0.000000
6/16/2011	10:50:57 AM	PHl3 MFC set to  0.000000
6/16/2011	10:50:57 AM	SiCl4 MFC set to  0.000000
6/16/2011	10:50:57 AM	Tube furnace set to 0
6/16/2011	10:50:57 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/16/2011	10:50:59 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/16/2011	10:51:00 AM	Recipe started at 10:51 AM
6/16/2011	10:51:00 AM	Helium valve closed
6/16/2011	10:51:00 AM	H2 valve closed
6/16/2011	10:51:00 AM	BCl3 valve closed
6/16/2011	10:51:00 AM	PH3 valve closed
6/16/2011	10:51:00 AM	SiCl4 pre valve closed
6/16/2011	10:51:00 AM	SiCl4 post valve closed
6/16/2011	10:51:00 AM	Main Vac valve closed
6/16/2011	10:51:00 AM	Bubbler valve closed
6/16/2011	10:51:00 AM	Bypass valve opened
6/16/2011	10:51:00 AM	Helium MFC set to  0.000000
6/16/2011	10:51:00 AM	H2 MFC set to  0.000000
6/16/2011	10:51:00 AM	BCl3 MFC set to  0.000000
6/16/2011	10:51:00 AM	PHl3 MFC set to  0.000000
6/16/2011	10:51:00 AM	SiCl4 MFC set to  0.000000
6/16/2011	10:51:00 AM	Bypass solenoid MFC set to  0.000000
6/16/2011	10:51:00 AM	Tube furnace set to 0
6/16/2011	10:51:09 AM	Helium valve closed
6/16/2011	10:51:09 AM	H2 valve closed
6/16/2011	10:51:09 AM	BCl3 valve closed
6/16/2011	10:51:09 AM	PH3 valve closed
6/16/2011	10:51:09 AM	SiCl4 pre valve closed
6/16/2011	10:51:09 AM	SiCl4 post valve closed
6/16/2011	10:51:09 AM	Bubbler valve closed
6/16/2011	10:51:09 AM	Main Vac valve opened
6/16/2011	10:51:09 AM	Bypass valve opened
6/16/2011	10:51:09 AM	Helium MFC set to  0.000000
6/16/2011	10:51:09 AM	H2 MFC set to  0.000000
6/16/2011	10:51:09 AM	BCl3 MFC set to  0.000000
6/16/2011	10:51:09 AM	PHl3 MFC set to  0.000000
6/16/2011	10:51:09 AM	SiCl4 MFC set to  0.000000
6/16/2011	10:51:09 AM	Bypass solenoid MFC set to  0.000000
6/16/2011	10:51:10 AM	Tube furnace set to 0
6/16/2011	10:51:10 AM	Run finished at 10:51 AM
6/16/2011	10:51:10 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/16/2011	10:51:34 AM	Program exited cleanly
6/16/2011	10:51:54 AM	Program started normally
6/16/2011	10:51:54 AM	Helium valve closed
6/16/2011	10:51:54 AM	H2 valve closed
6/16/2011	10:51:54 AM	BCl3 valve closed
6/16/2011	10:51:54 AM	PH3 valve closed
6/16/2011	10:51:54 AM	SiCl4 pre valve closed
6/16/2011	10:51:54 AM	SiCl4 post valve closed
6/16/2011	10:51:54 AM	Main Vac valve closed
6/16/2011	10:51:54 AM	Bypass valve closed
6/16/2011	10:51:54 AM	Bubbler valve closed
6/16/2011	10:51:54 AM	Helium MFC set to  0.000000
6/16/2011	10:51:54 AM	H2 MFC set to  0.000000
6/16/2011	10:51:54 AM	BCl3 MFC set to  0.000000
6/16/2011	10:51:54 AM	PHl3 MFC set to  0.000000
6/16/2011	10:51:54 AM	SiCl4 MFC set to  0.000000
6/16/2011	10:51:54 AM	Bypass solenoid MFC set to  760.000000
6/16/2011	10:51:54 AM	Tube furnace set to 0
6/16/2011	10:51:56 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/16/2011	10:51:57 AM	Recipe started at 10:51 AM
6/16/2011	10:51:57 AM	Helium valve closed
6/16/2011	10:51:57 AM	H2 valve closed
6/16/2011	10:51:57 AM	BCl3 valve closed
6/16/2011	10:51:57 AM	PH3 valve closed
6/16/2011	10:51:57 AM	SiCl4 pre valve closed
6/16/2011	10:51:57 AM	SiCl4 post valve closed
6/16/2011	10:51:57 AM	Main Vac valve closed
6/16/2011	10:51:57 AM	Bubbler valve closed
6/16/2011	10:51:57 AM	Bypass valve opened
6/16/2011	10:51:57 AM	Helium MFC set to  0.000000
6/16/2011	10:51:57 AM	H2 MFC set to  0.000000
6/16/2011	10:51:57 AM	BCl3 MFC set to  0.000000
6/16/2011	10:51:57 AM	PHl3 MFC set to  0.000000
6/16/2011	10:51:57 AM	SiCl4 MFC set to  0.000000
6/16/2011	10:51:57 AM	Bypass solenoid MFC set to  0.000000
6/16/2011	10:51:57 AM	Tube furnace set to 0
6/16/2011	10:51:57 AM	Helium valve closed
6/16/2011	10:51:57 AM	H2 valve closed
6/16/2011	10:51:57 AM	BCl3 valve closed
6/16/2011	10:51:57 AM	PH3 valve closed
6/16/2011	10:51:57 AM	SiCl4 pre valve closed
6/16/2011	10:51:57 AM	SiCl4 post valve closed
6/16/2011	10:51:57 AM	Bubbler valve closed
6/16/2011	10:51:57 AM	Main Vac valve opened
6/16/2011	10:51:57 AM	Bypass valve opened
6/16/2011	10:51:57 AM	Helium MFC set to  0.000000
6/16/2011	10:51:57 AM	H2 MFC set to  0.000000
6/16/2011	10:51:57 AM	BCl3 MFC set to  0.000000
6/16/2011	10:51:57 AM	PHl3 MFC set to  0.000000
6/16/2011	10:51:57 AM	SiCl4 MFC set to  0.000000
6/16/2011	10:51:57 AM	Bypass solenoid MFC set to  0.000000
6/16/2011	10:51:58 AM	Tube furnace set to 0
6/16/2011	10:51:58 AM	Run finished at 10:51 AM
6/16/2011	10:51:58 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/16/2011	10:52:54 AM	Program exited cleanly
6/16/2011	10:52:55 AM	Program started normally
6/16/2011	10:52:55 AM	Helium valve closed
6/16/2011	10:52:55 AM	H2 valve closed
6/16/2011	10:52:55 AM	BCl3 valve closed
6/16/2011	10:52:55 AM	PH3 valve closed
6/16/2011	10:52:55 AM	SiCl4 pre valve closed
6/16/2011	10:52:55 AM	SiCl4 post valve closed
6/16/2011	10:52:55 AM	Main Vac valve closed
6/16/2011	10:52:55 AM	Bypass valve closed
6/16/2011	10:52:55 AM	Bubbler valve closed
6/16/2011	10:52:55 AM	Helium MFC set to  0.000000
6/16/2011	10:52:55 AM	H2 MFC set to  0.000000
6/16/2011	10:52:55 AM	BCl3 MFC set to  0.000000
6/16/2011	10:52:55 AM	PHl3 MFC set to  0.000000
6/16/2011	10:52:55 AM	SiCl4 MFC set to  0.000000
6/16/2011	10:52:55 AM	Bypass solenoid MFC set to  760.000000
6/16/2011	10:52:55 AM	Tube furnace set to 0
6/16/2011	10:53:00 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/16/2011	10:53:01 AM	Recipe started at 10:53 AM
6/16/2011	10:53:01 AM	Helium valve closed
6/16/2011	10:53:01 AM	H2 valve closed
6/16/2011	10:53:01 AM	BCl3 valve closed
6/16/2011	10:53:01 AM	PH3 valve closed
6/16/2011	10:53:01 AM	SiCl4 pre valve closed
6/16/2011	10:53:01 AM	SiCl4 post valve closed
6/16/2011	10:53:01 AM	Main Vac valve closed
6/16/2011	10:53:01 AM	Bubbler valve closed
6/16/2011	10:53:01 AM	Bypass valve opened
6/16/2011	10:53:01 AM	Helium MFC set to  0.000000
6/16/2011	10:53:01 AM	H2 MFC set to  0.000000
6/16/2011	10:53:01 AM	BCl3 MFC set to  0.000000
6/16/2011	10:53:01 AM	PHl3 MFC set to  0.000000
6/16/2011	10:53:01 AM	SiCl4 MFC set to  0.000000
6/16/2011	10:53:01 AM	Bypass solenoid MFC set to  0.000000
6/16/2011	10:53:01 AM	Tube furnace set to 0
6/16/2011	10:53:01 AM	Helium valve closed
6/16/2011	10:53:01 AM	H2 valve closed
6/16/2011	10:53:01 AM	BCl3 valve closed
6/16/2011	10:53:01 AM	PH3 valve closed
6/16/2011	10:53:01 AM	SiCl4 pre valve closed
6/16/2011	10:53:01 AM	SiCl4 post valve closed
6/16/2011	10:53:01 AM	Bubbler valve closed
6/16/2011	10:53:01 AM	Main Vac valve opened
6/16/2011	10:53:01 AM	Bypass valve opened
6/16/2011	10:53:01 AM	Helium MFC set to  0.000000
6/16/2011	10:53:01 AM	H2 MFC set to  0.000000
6/16/2011	10:53:01 AM	BCl3 MFC set to  0.000000
6/16/2011	10:53:01 AM	PHl3 MFC set to  0.000000
6/16/2011	10:53:01 AM	SiCl4 MFC set to  0.000000
6/16/2011	10:53:01 AM	Bypass solenoid MFC set to  0.000000
6/16/2011	10:53:01 AM	Tube furnace set to 0
6/16/2011	10:53:02 AM	Run finished at 10:53 AM
6/16/2011	10:53:02 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/16/2011	12:15:29 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/16/2011	12:15:29 PM	Recipe started at 12:15 PM
6/16/2011	12:15:29 PM	H2 valve closed
6/16/2011	12:15:29 PM	BCl3 valve closed
6/16/2011	12:15:29 PM	PH3 valve closed
6/16/2011	12:15:29 PM	SiCl4 pre valve closed
6/16/2011	12:15:29 PM	SiCl4 post valve closed
6/16/2011	12:15:29 PM	Main Vac valve closed
6/16/2011	12:15:29 PM	Bypass valve closed
6/16/2011	12:15:29 PM	Bubbler valve closed
6/16/2011	12:15:29 PM	Helium valve opened
6/16/2011	12:15:29 PM	Helium MFC set to  500.000000
6/16/2011	12:15:29 PM	H2 MFC set to  0.000000
6/16/2011	12:15:29 PM	BCl3 MFC set to  0.000000
6/16/2011	12:15:29 PM	PHl3 MFC set to  0.000000
6/16/2011	12:15:29 PM	SiCl4 MFC set to  0.000000
6/16/2011	12:15:29 PM	Bypass solenoid MFC set to  0.000000
6/16/2011	12:15:30 PM	Tube furnace set to 0
6/16/2011	12:16:49 PM	Helium valve closed
6/16/2011	12:16:49 PM	H2 valve closed
6/16/2011	12:16:49 PM	BCl3 valve closed
6/16/2011	12:16:49 PM	PH3 valve closed
6/16/2011	12:16:49 PM	SiCl4 pre valve closed
6/16/2011	12:16:49 PM	SiCl4 post valve closed
6/16/2011	12:16:49 PM	Main Vac valve closed
6/16/2011	12:16:49 PM	Bypass valve closed
6/16/2011	12:16:49 PM	Bubbler valve closed
6/16/2011	12:16:49 PM	Helium MFC set to  0.000000
6/16/2011	12:16:49 PM	H2 MFC set to  0.000000
6/16/2011	12:16:49 PM	BCl3 MFC set to  0.000000
6/16/2011	12:16:49 PM	PHl3 MFC set to  0.000000
6/16/2011	12:16:49 PM	SiCl4 MFC set to  0.000000
6/16/2011	12:16:49 PM	Bypass solenoid MFC set to  0.000000
6/16/2011	12:16:49 PM	Tube furnace set to 0
6/16/2011	12:16:49 PM	Run finished at 12:16 PM
6/16/2011	12:16:49 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/16/2011	12:25:17 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/16/2011	12:25:17 PM	Recipe started at 12:25 PM
6/16/2011	12:25:17 PM	Helium valve closed
6/16/2011	12:25:17 PM	H2 valve closed
6/16/2011	12:25:17 PM	BCl3 valve closed
6/16/2011	12:25:17 PM	PH3 valve closed
6/16/2011	12:25:17 PM	SiCl4 pre valve closed
6/16/2011	12:25:17 PM	SiCl4 post valve closed
6/16/2011	12:25:17 PM	Main Vac valve closed
6/16/2011	12:25:17 PM	Bubbler valve closed
6/16/2011	12:25:17 PM	Bypass valve opened
6/16/2011	12:25:17 PM	Helium MFC set to  0.000000
6/16/2011	12:25:17 PM	H2 MFC set to  0.000000
6/16/2011	12:25:17 PM	BCl3 MFC set to  0.000000
6/16/2011	12:25:17 PM	PHl3 MFC set to  0.000000
6/16/2011	12:25:17 PM	SiCl4 MFC set to  0.000000
6/16/2011	12:25:17 PM	Bypass solenoid MFC set to  0.000000
6/16/2011	12:25:18 PM	Tube furnace set to 0
6/16/2011	12:25:50 PM	Helium valve closed
6/16/2011	12:25:50 PM	H2 valve closed
6/16/2011	12:25:50 PM	BCl3 valve closed
6/16/2011	12:25:50 PM	PH3 valve closed
6/16/2011	12:25:50 PM	SiCl4 pre valve closed
6/16/2011	12:25:50 PM	SiCl4 post valve closed
6/16/2011	12:25:50 PM	Bubbler valve closed
6/16/2011	12:25:50 PM	Main Vac valve opened
6/16/2011	12:25:50 PM	Bypass valve opened
6/16/2011	12:25:50 PM	Helium MFC set to  0.000000
6/16/2011	12:25:50 PM	H2 MFC set to  0.000000
6/16/2011	12:25:50 PM	BCl3 MFC set to  0.000000
6/16/2011	12:25:50 PM	PHl3 MFC set to  0.000000
6/16/2011	12:25:50 PM	SiCl4 MFC set to  0.000000
6/16/2011	12:25:50 PM	Bypass solenoid MFC set to  0.000000
6/16/2011	12:25:50 PM	Tube furnace set to 0
6/16/2011	12:25:50 PM	Run finished at 12:25 PM
6/16/2011	12:25:50 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/16/2011	12:34:03 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
6/16/2011	12:34:14 PM	Recipe started at 12:34 PM
6/16/2011	12:34:14 PM	Helium valve closed
6/16/2011	12:34:14 PM	H2 valve closed
6/16/2011	12:34:14 PM	BCl3 valve closed
6/16/2011	12:34:14 PM	PH3 valve closed
6/16/2011	12:34:14 PM	SiCl4 pre valve closed
6/16/2011	12:34:14 PM	SiCl4 post valve closed
6/16/2011	12:34:14 PM	Main Vac valve closed
6/16/2011	12:34:14 PM	Bubbler valve closed
6/16/2011	12:34:14 PM	Bypass valve opened
6/16/2011	12:34:14 PM	Helium MFC set to  0.000000
6/16/2011	12:34:14 PM	H2 MFC set to  0.000000
6/16/2011	12:34:14 PM	BCl3 MFC set to  0.000000
6/16/2011	12:34:14 PM	PHl3 MFC set to  0.000000
6/16/2011	12:34:14 PM	SiCl4 MFC set to  0.000000
6/16/2011	12:34:14 PM	Bypass solenoid MFC set to  0.000000
6/16/2011	12:34:15 PM	Tube furnace set to 0
6/16/2011	12:34:15 PM	Helium valve closed
6/16/2011	12:34:15 PM	H2 valve closed
6/16/2011	12:34:15 PM	BCl3 valve closed
6/16/2011	12:34:15 PM	PH3 valve closed
6/16/2011	12:34:15 PM	SiCl4 pre valve closed
6/16/2011	12:34:15 PM	SiCl4 post valve closed
6/16/2011	12:34:15 PM	Bubbler valve closed
6/16/2011	12:34:15 PM	Main Vac valve opened
6/16/2011	12:34:15 PM	Bypass valve opened
6/16/2011	12:34:15 PM	Helium MFC set to  0.000000
6/16/2011	12:34:15 PM	H2 MFC set to  0.000000
6/16/2011	12:34:15 PM	BCl3 MFC set to  0.000000
6/16/2011	12:34:15 PM	PHl3 MFC set to  0.000000
6/16/2011	12:34:15 PM	SiCl4 MFC set to  0.000000
6/16/2011	12:34:15 PM	Bypass solenoid MFC set to  0.000000
6/16/2011	12:34:15 PM	Tube furnace set to 0
6/16/2011	12:34:29 PM	H2 valve closed
6/16/2011	12:34:29 PM	BCl3 valve closed
6/16/2011	12:34:29 PM	PH3 valve closed
6/16/2011	12:34:29 PM	SiCl4 pre valve closed
6/16/2011	12:34:29 PM	SiCl4 post valve closed
6/16/2011	12:34:29 PM	Bubbler valve closed
6/16/2011	12:34:29 PM	Helium valve opened
6/16/2011	12:34:29 PM	Main Vac valve opened
6/16/2011	12:34:29 PM	Bypass valve opened
6/16/2011	12:34:29 PM	Helium MFC set to  100.000000
6/16/2011	12:34:29 PM	H2 MFC set to  0.000000
6/16/2011	12:34:29 PM	BCl3 MFC set to  0.000000
6/16/2011	12:34:29 PM	PHl3 MFC set to  0.000000
6/16/2011	12:34:29 PM	SiCl4 MFC set to  0.000000
6/16/2011	12:34:29 PM	Bypass solenoid MFC set to  0.000000
6/16/2011	12:34:29 PM	Tube furnace set to 0
6/16/2011	12:35:29 PM	Helium valve closed
6/16/2011	12:35:29 PM	H2 valve closed
6/16/2011	12:35:29 PM	BCl3 valve closed
6/16/2011	12:35:29 PM	PH3 valve closed
6/16/2011	12:35:29 PM	SiCl4 pre valve closed
6/16/2011	12:35:29 PM	SiCl4 post valve closed
6/16/2011	12:35:29 PM	Bubbler valve closed
6/16/2011	12:35:29 PM	Main Vac valve opened
6/16/2011	12:35:29 PM	Bypass valve opened
6/16/2011	12:35:29 PM	Helium MFC set to  0.000000
6/16/2011	12:35:29 PM	H2 MFC set to  0.000000
6/16/2011	12:35:29 PM	BCl3 MFC set to  0.000000
6/16/2011	12:35:29 PM	PHl3 MFC set to  0.000000
6/16/2011	12:35:29 PM	SiCl4 MFC set to  0.000000
6/16/2011	12:35:29 PM	Bypass solenoid MFC set to  0.000000
6/16/2011	12:35:30 PM	Tube furnace set to 0
6/16/2011	12:36:30 PM	H2 valve closed
6/16/2011	12:36:30 PM	BCl3 valve closed
6/16/2011	12:36:30 PM	PH3 valve closed
6/16/2011	12:36:30 PM	SiCl4 pre valve closed
6/16/2011	12:36:30 PM	SiCl4 post valve closed
6/16/2011	12:36:30 PM	Bubbler valve closed
6/16/2011	12:36:30 PM	Helium valve opened
6/16/2011	12:36:30 PM	Main Vac valve opened
6/16/2011	12:36:30 PM	Bypass valve opened
6/16/2011	12:36:30 PM	Helium MFC set to  100.000000
6/16/2011	12:36:30 PM	H2 MFC set to  0.000000
6/16/2011	12:36:30 PM	BCl3 MFC set to  0.000000
6/16/2011	12:36:30 PM	PHl3 MFC set to  0.000000
6/16/2011	12:36:30 PM	SiCl4 MFC set to  0.000000
6/16/2011	12:36:30 PM	Bypass solenoid MFC set to  0.000000
6/16/2011	12:36:30 PM	Tube furnace set to 0
6/16/2011	12:37:30 PM	Helium valve closed
6/16/2011	12:37:30 PM	H2 valve closed
6/16/2011	12:37:30 PM	BCl3 valve closed
6/16/2011	12:37:30 PM	PH3 valve closed
6/16/2011	12:37:30 PM	SiCl4 pre valve closed
6/16/2011	12:37:30 PM	SiCl4 post valve closed
6/16/2011	12:37:30 PM	Bubbler valve closed
6/16/2011	12:37:30 PM	Main Vac valve opened
6/16/2011	12:37:30 PM	Bypass valve opened
6/16/2011	12:37:30 PM	Helium MFC set to  0.000000
6/16/2011	12:37:30 PM	H2 MFC set to  0.000000
6/16/2011	12:37:30 PM	BCl3 MFC set to  0.000000
6/16/2011	12:37:30 PM	PHl3 MFC set to  0.000000
6/16/2011	12:37:30 PM	SiCl4 MFC set to  0.000000
6/16/2011	12:37:30 PM	Bypass solenoid MFC set to  0.000000
6/16/2011	12:37:30 PM	Tube furnace set to 0
6/16/2011	12:38:30 PM	H2 valve closed
6/16/2011	12:38:30 PM	BCl3 valve closed
6/16/2011	12:38:30 PM	PH3 valve closed
6/16/2011	12:38:30 PM	SiCl4 pre valve closed
6/16/2011	12:38:30 PM	SiCl4 post valve closed
6/16/2011	12:38:30 PM	Bubbler valve closed
6/16/2011	12:38:30 PM	Helium valve opened
6/16/2011	12:38:30 PM	Main Vac valve opened
6/16/2011	12:38:30 PM	Bypass valve opened
6/16/2011	12:38:30 PM	Helium MFC set to  100.000000
6/16/2011	12:38:30 PM	H2 MFC set to  0.000000
6/16/2011	12:38:30 PM	BCl3 MFC set to  0.000000
6/16/2011	12:38:30 PM	PHl3 MFC set to  0.000000
6/16/2011	12:38:30 PM	SiCl4 MFC set to  0.000000
6/16/2011	12:38:30 PM	Bypass solenoid MFC set to  0.000000
6/16/2011	12:38:30 PM	Tube furnace set to 0
6/16/2011	12:39:30 PM	Helium valve closed
6/16/2011	12:39:30 PM	H2 valve closed
6/16/2011	12:39:30 PM	BCl3 valve closed
6/16/2011	12:39:30 PM	PH3 valve closed
6/16/2011	12:39:30 PM	SiCl4 pre valve closed
6/16/2011	12:39:30 PM	SiCl4 post valve closed
6/16/2011	12:39:30 PM	Bubbler valve closed
6/16/2011	12:39:30 PM	Main Vac valve opened
6/16/2011	12:39:30 PM	Bypass valve opened
6/16/2011	12:39:30 PM	Helium MFC set to  0.000000
6/16/2011	12:39:30 PM	H2 MFC set to  0.000000
6/16/2011	12:39:30 PM	BCl3 MFC set to  0.000000
6/16/2011	12:39:30 PM	PHl3 MFC set to  0.000000
6/16/2011	12:39:30 PM	SiCl4 MFC set to  0.000000
6/16/2011	12:39:30 PM	Bypass solenoid MFC set to  0.000000
6/16/2011	12:39:30 PM	Tube furnace set to 0
6/16/2011	12:40:30 PM	H2 valve closed
6/16/2011	12:40:30 PM	BCl3 valve closed
6/16/2011	12:40:30 PM	PH3 valve closed
6/16/2011	12:40:30 PM	SiCl4 pre valve closed
6/16/2011	12:40:30 PM	SiCl4 post valve closed
6/16/2011	12:40:30 PM	Bubbler valve closed
6/16/2011	12:40:30 PM	Helium valve opened
6/16/2011	12:40:30 PM	Main Vac valve opened
6/16/2011	12:40:30 PM	Bypass valve opened
6/16/2011	12:40:30 PM	Helium MFC set to  100.000000
6/16/2011	12:40:30 PM	H2 MFC set to  0.000000
6/16/2011	12:40:30 PM	BCl3 MFC set to  0.000000
6/16/2011	12:40:30 PM	PHl3 MFC set to  0.000000
6/16/2011	12:40:30 PM	SiCl4 MFC set to  0.000000
6/16/2011	12:40:30 PM	Bypass solenoid MFC set to  0.000000
6/16/2011	12:40:31 PM	Tube furnace set to 0
6/16/2011	12:41:31 PM	Helium valve closed
6/16/2011	12:41:31 PM	H2 valve closed
6/16/2011	12:41:31 PM	BCl3 valve closed
6/16/2011	12:41:31 PM	PH3 valve closed
6/16/2011	12:41:31 PM	SiCl4 pre valve closed
6/16/2011	12:41:31 PM	SiCl4 post valve closed
6/16/2011	12:41:31 PM	Bubbler valve closed
6/16/2011	12:41:31 PM	Main Vac valve opened
6/16/2011	12:41:31 PM	Bypass valve opened
6/16/2011	12:41:31 PM	Helium MFC set to  0.000000
6/16/2011	12:41:31 PM	H2 MFC set to  0.000000
6/16/2011	12:41:31 PM	BCl3 MFC set to  0.000000
6/16/2011	12:41:31 PM	PHl3 MFC set to  0.000000
6/16/2011	12:41:31 PM	SiCl4 MFC set to  0.000000
6/16/2011	12:41:31 PM	Bypass solenoid MFC set to  0.000000
6/16/2011	12:41:31 PM	Tube furnace set to 0
6/16/2011	12:42:31 PM	H2 valve closed
6/16/2011	12:42:31 PM	BCl3 valve closed
6/16/2011	12:42:31 PM	PH3 valve closed
6/16/2011	12:42:31 PM	SiCl4 pre valve closed
6/16/2011	12:42:31 PM	SiCl4 post valve closed
6/16/2011	12:42:31 PM	Bubbler valve closed
6/16/2011	12:42:31 PM	Helium valve opened
6/16/2011	12:42:31 PM	Main Vac valve opened
6/16/2011	12:42:31 PM	Bypass valve opened
6/16/2011	12:42:31 PM	Helium MFC set to  100.000000
6/16/2011	12:42:31 PM	H2 MFC set to  0.000000
6/16/2011	12:42:31 PM	BCl3 MFC set to  0.000000
6/16/2011	12:42:31 PM	PHl3 MFC set to  0.000000
6/16/2011	12:42:31 PM	SiCl4 MFC set to  0.000000
6/16/2011	12:42:31 PM	Bypass solenoid MFC set to  0.000000
6/16/2011	12:42:31 PM	Tube furnace set to 0
6/16/2011	12:43:31 PM	Helium valve closed
6/16/2011	12:43:31 PM	H2 valve closed
6/16/2011	12:43:31 PM	BCl3 valve closed
6/16/2011	12:43:31 PM	PH3 valve closed
6/16/2011	12:43:31 PM	SiCl4 pre valve closed
6/16/2011	12:43:31 PM	SiCl4 post valve closed
6/16/2011	12:43:31 PM	Bubbler valve closed
6/16/2011	12:43:31 PM	Main Vac valve opened
6/16/2011	12:43:31 PM	Bypass valve opened
6/16/2011	12:43:31 PM	Helium MFC set to  0.000000
6/16/2011	12:43:31 PM	H2 MFC set to  0.000000
6/16/2011	12:43:31 PM	BCl3 MFC set to  0.000000
6/16/2011	12:43:31 PM	PHl3 MFC set to  0.000000
6/16/2011	12:43:31 PM	SiCl4 MFC set to  0.000000
6/16/2011	12:43:31 PM	Bypass solenoid MFC set to  0.000000
6/16/2011	12:43:31 PM	Tube furnace set to 0
6/16/2011	12:44:31 PM	H2 valve closed
6/16/2011	12:44:31 PM	BCl3 valve closed
6/16/2011	12:44:31 PM	PH3 valve closed
6/16/2011	12:44:31 PM	SiCl4 pre valve closed
6/16/2011	12:44:31 PM	SiCl4 post valve closed
6/16/2011	12:44:31 PM	Bubbler valve closed
6/16/2011	12:44:31 PM	Helium valve opened
6/16/2011	12:44:31 PM	Main Vac valve opened
6/16/2011	12:44:31 PM	Bypass valve opened
6/16/2011	12:44:31 PM	Helium MFC set to  100.000000
6/16/2011	12:44:31 PM	H2 MFC set to  0.000000
6/16/2011	12:44:31 PM	BCl3 MFC set to  0.000000
6/16/2011	12:44:31 PM	PHl3 MFC set to  0.000000
6/16/2011	12:44:31 PM	SiCl4 MFC set to  0.000000
6/16/2011	12:44:31 PM	Bypass solenoid MFC set to  0.000000
6/16/2011	12:44:31 PM	Tube furnace set to 0
6/16/2011	12:45:31 PM	Helium valve closed
6/16/2011	12:45:31 PM	H2 valve closed
6/16/2011	12:45:31 PM	BCl3 valve closed
6/16/2011	12:45:31 PM	PH3 valve closed
6/16/2011	12:45:31 PM	SiCl4 pre valve closed
6/16/2011	12:45:31 PM	SiCl4 post valve closed
6/16/2011	12:45:31 PM	Bubbler valve closed
6/16/2011	12:45:31 PM	Main Vac valve opened
6/16/2011	12:45:31 PM	Bypass valve opened
6/16/2011	12:45:31 PM	Helium MFC set to  0.000000
6/16/2011	12:45:31 PM	H2 MFC set to  0.000000
6/16/2011	12:45:31 PM	BCl3 MFC set to  0.000000
6/16/2011	12:45:31 PM	PHl3 MFC set to  0.000000
6/16/2011	12:45:31 PM	SiCl4 MFC set to  0.000000
6/16/2011	12:45:31 PM	Bypass solenoid MFC set to  0.000000
6/16/2011	12:45:32 PM	Tube furnace set to 0
6/16/2011	12:46:32 PM	H2 valve closed
6/16/2011	12:46:32 PM	BCl3 valve closed
6/16/2011	12:46:32 PM	PH3 valve closed
6/16/2011	12:46:32 PM	SiCl4 pre valve closed
6/16/2011	12:46:32 PM	SiCl4 post valve closed
6/16/2011	12:46:32 PM	Bubbler valve closed
6/16/2011	12:46:32 PM	Helium valve opened
6/16/2011	12:46:32 PM	Main Vac valve opened
6/16/2011	12:46:32 PM	Bypass valve opened
6/16/2011	12:46:32 PM	Helium MFC set to  100.000000
6/16/2011	12:46:32 PM	H2 MFC set to  0.000000
6/16/2011	12:46:32 PM	BCl3 MFC set to  0.000000
6/16/2011	12:46:32 PM	PHl3 MFC set to  0.000000
6/16/2011	12:46:32 PM	SiCl4 MFC set to  0.000000
6/16/2011	12:46:32 PM	Bypass solenoid MFC set to  0.000000
6/16/2011	12:46:32 PM	Tube furnace set to 0
6/16/2011	12:47:32 PM	Helium valve closed
6/16/2011	12:47:32 PM	H2 valve closed
6/16/2011	12:47:32 PM	BCl3 valve closed
6/16/2011	12:47:32 PM	PH3 valve closed
6/16/2011	12:47:32 PM	SiCl4 pre valve closed
6/16/2011	12:47:32 PM	SiCl4 post valve closed
6/16/2011	12:47:32 PM	Bubbler valve closed
6/16/2011	12:47:32 PM	Main Vac valve opened
6/16/2011	12:47:32 PM	Bypass valve opened
6/16/2011	12:47:32 PM	Helium MFC set to  0.000000
6/16/2011	12:47:32 PM	H2 MFC set to  0.000000
6/16/2011	12:47:32 PM	BCl3 MFC set to  0.000000
6/16/2011	12:47:32 PM	PHl3 MFC set to  0.000000
6/16/2011	12:47:32 PM	SiCl4 MFC set to  0.000000
6/16/2011	12:47:32 PM	Bypass solenoid MFC set to  0.000000
6/16/2011	12:47:32 PM	Tube furnace set to 0
6/16/2011	12:48:32 PM	H2 valve closed
6/16/2011	12:48:32 PM	BCl3 valve closed
6/16/2011	12:48:32 PM	PH3 valve closed
6/16/2011	12:48:32 PM	SiCl4 pre valve closed
6/16/2011	12:48:32 PM	SiCl4 post valve closed
6/16/2011	12:48:32 PM	Bubbler valve closed
6/16/2011	12:48:32 PM	Helium valve opened
6/16/2011	12:48:32 PM	Main Vac valve opened
6/16/2011	12:48:32 PM	Bypass valve opened
6/16/2011	12:48:32 PM	Helium MFC set to  100.000000
6/16/2011	12:48:32 PM	H2 MFC set to  0.000000
6/16/2011	12:48:32 PM	BCl3 MFC set to  0.000000
6/16/2011	12:48:32 PM	PHl3 MFC set to  0.000000
6/16/2011	12:48:32 PM	SiCl4 MFC set to  0.000000
6/16/2011	12:48:32 PM	Bypass solenoid MFC set to  0.000000
6/16/2011	12:48:32 PM	Tube furnace set to 0
6/16/2011	12:49:32 PM	Helium valve closed
6/16/2011	12:49:32 PM	H2 valve closed
6/16/2011	12:49:32 PM	BCl3 valve closed
6/16/2011	12:49:32 PM	PH3 valve closed
6/16/2011	12:49:32 PM	SiCl4 pre valve closed
6/16/2011	12:49:32 PM	SiCl4 post valve closed
6/16/2011	12:49:32 PM	Bubbler valve closed
6/16/2011	12:49:32 PM	Main Vac valve opened
6/16/2011	12:49:32 PM	Bypass valve opened
6/16/2011	12:49:32 PM	Helium MFC set to  0.000000
6/16/2011	12:49:32 PM	H2 MFC set to  0.000000
6/16/2011	12:49:32 PM	BCl3 MFC set to  0.000000
6/16/2011	12:49:32 PM	PHl3 MFC set to  0.000000
6/16/2011	12:49:32 PM	SiCl4 MFC set to  0.000000
6/16/2011	12:49:32 PM	Bypass solenoid MFC set to  0.000000
6/16/2011	12:49:32 PM	Tube furnace set to 0
6/16/2011	12:50:32 PM	H2 valve closed
6/16/2011	12:50:32 PM	BCl3 valve closed
6/16/2011	12:50:32 PM	PH3 valve closed
6/16/2011	12:50:32 PM	SiCl4 pre valve closed
6/16/2011	12:50:32 PM	SiCl4 post valve closed
6/16/2011	12:50:32 PM	Bubbler valve closed
6/16/2011	12:50:32 PM	Helium valve opened
6/16/2011	12:50:32 PM	Main Vac valve opened
6/16/2011	12:50:32 PM	Bypass valve opened
6/16/2011	12:50:32 PM	Helium MFC set to  100.000000
6/16/2011	12:50:32 PM	H2 MFC set to  0.000000
6/16/2011	12:50:32 PM	BCl3 MFC set to  0.000000
6/16/2011	12:50:32 PM	PHl3 MFC set to  0.000000
6/16/2011	12:50:32 PM	SiCl4 MFC set to  0.000000
6/16/2011	12:50:32 PM	Bypass solenoid MFC set to  0.000000
6/16/2011	12:50:33 PM	Tube furnace set to 0
6/16/2011	12:51:33 PM	Helium valve closed
6/16/2011	12:51:33 PM	H2 valve closed
6/16/2011	12:51:33 PM	BCl3 valve closed
6/16/2011	12:51:33 PM	PH3 valve closed
6/16/2011	12:51:33 PM	SiCl4 pre valve closed
6/16/2011	12:51:33 PM	SiCl4 post valve closed
6/16/2011	12:51:33 PM	Bubbler valve closed
6/16/2011	12:51:33 PM	Main Vac valve opened
6/16/2011	12:51:33 PM	Bypass valve opened
6/16/2011	12:51:33 PM	Helium MFC set to  0.000000
6/16/2011	12:51:33 PM	H2 MFC set to  0.000000
6/16/2011	12:51:33 PM	BCl3 MFC set to  0.000000
6/16/2011	12:51:33 PM	PHl3 MFC set to  0.000000
6/16/2011	12:51:33 PM	SiCl4 MFC set to  0.000000
6/16/2011	12:51:33 PM	Bypass solenoid MFC set to  0.000000
6/16/2011	12:51:33 PM	Tube furnace set to 0
6/16/2011	12:52:33 PM	H2 valve closed
6/16/2011	12:52:33 PM	BCl3 valve closed
6/16/2011	12:52:33 PM	PH3 valve closed
6/16/2011	12:52:33 PM	SiCl4 pre valve closed
6/16/2011	12:52:33 PM	SiCl4 post valve closed
6/16/2011	12:52:33 PM	Bubbler valve closed
6/16/2011	12:52:33 PM	Helium valve opened
6/16/2011	12:52:33 PM	Main Vac valve opened
6/16/2011	12:52:33 PM	Bypass valve opened
6/16/2011	12:52:33 PM	Helium MFC set to  100.000000
6/16/2011	12:52:33 PM	H2 MFC set to  0.000000
6/16/2011	12:52:33 PM	BCl3 MFC set to  0.000000
6/16/2011	12:52:33 PM	PHl3 MFC set to  0.000000
6/16/2011	12:52:33 PM	SiCl4 MFC set to  0.000000
6/16/2011	12:52:33 PM	Bypass solenoid MFC set to  0.000000
6/16/2011	12:52:33 PM	Tube furnace set to 0
6/16/2011	12:53:33 PM	Helium valve closed
6/16/2011	12:53:33 PM	H2 valve closed
6/16/2011	12:53:33 PM	BCl3 valve closed
6/16/2011	12:53:33 PM	PH3 valve closed
6/16/2011	12:53:33 PM	SiCl4 pre valve closed
6/16/2011	12:53:33 PM	SiCl4 post valve closed
6/16/2011	12:53:33 PM	Bubbler valve closed
6/16/2011	12:53:33 PM	Main Vac valve opened
6/16/2011	12:53:33 PM	Bypass valve opened
6/16/2011	12:53:33 PM	Helium MFC set to  0.000000
6/16/2011	12:53:33 PM	H2 MFC set to  0.000000
6/16/2011	12:53:33 PM	BCl3 MFC set to  0.000000
6/16/2011	12:53:33 PM	PHl3 MFC set to  0.000000
6/16/2011	12:53:33 PM	SiCl4 MFC set to  0.000000
6/16/2011	12:53:33 PM	Bypass solenoid MFC set to  0.000000
6/16/2011	12:53:33 PM	Tube furnace set to 0
6/16/2011	12:53:34 PM	Run finished at 12:53 PM
6/16/2011	12:53:34 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
6/16/2011	1:30:28 PM	Helium MFC set to  50.000000
6/16/2011	1:30:30 PM	Helium valve opened
6/16/2011	1:30:47 PM	Recipe started at 1:30 PM
6/16/2011	1:30:47 PM	H2 valve closed
6/16/2011	1:30:47 PM	BCl3 valve closed
6/16/2011	1:30:47 PM	PH3 valve closed
6/16/2011	1:30:47 PM	SiCl4 pre valve closed
6/16/2011	1:30:47 PM	SiCl4 post valve closed
6/16/2011	1:30:47 PM	Bubbler valve closed
6/16/2011	1:30:47 PM	Helium valve opened
6/16/2011	1:30:47 PM	Main Vac valve opened
6/16/2011	1:30:47 PM	Bypass valve opened
6/16/2011	1:30:47 PM	Helium MFC set to  50.000000
6/16/2011	1:30:47 PM	H2 MFC set to  0.000000
6/16/2011	1:30:47 PM	BCl3 MFC set to  0.000000
6/16/2011	1:30:47 PM	PHl3 MFC set to  0.000000
6/16/2011	1:30:47 PM	SiCl4 MFC set to  0.000000
6/16/2011	1:30:47 PM	Bypass solenoid MFC set to  0.000000
6/16/2011	1:30:47 PM	Tube furnace set to 0
6/16/2011	1:30:47 PM	Run finished at 1:30 PM
6/16/2011	1:32:37 PM	Helium valve closed
6/16/2011	1:36:32 PM	Helium valve opened
6/16/2011	1:38:30 PM	Helium valve closed
6/16/2011	1:39:31 PM	Bypass valve closed
6/16/2011	1:39:33 PM	Main Vac valve closed
6/16/2011	1:39:52 PM	Main Vac valve opened
6/16/2011	1:39:53 PM	Bypass valve opened
6/16/2011	1:41:06 PM	Recipe started at 1:41 PM
6/16/2011	1:41:06 PM	Helium valve closed
6/16/2011	1:41:06 PM	BCl3 valve closed
6/16/2011	1:41:06 PM	PH3 valve closed
6/16/2011	1:41:06 PM	SiCl4 pre valve closed
6/16/2011	1:41:06 PM	SiCl4 post valve closed
6/16/2011	1:41:06 PM	Main Vac valve closed
6/16/2011	1:41:06 PM	Bypass valve closed
6/16/2011	1:41:06 PM	Bubbler valve closed
6/16/2011	1:41:06 PM	H2 valve opened
6/16/2011	1:41:06 PM	Helium MFC set to  0.000000
6/16/2011	1:41:06 PM	H2 MFC set to  500.000000
6/16/2011	1:41:06 PM	BCl3 MFC set to  0.000000
6/16/2011	1:41:06 PM	PHl3 MFC set to  0.000000
6/16/2011	1:41:06 PM	SiCl4 MFC set to  0.000000
6/16/2011	1:41:06 PM	Bypass solenoid MFC set to  0.000000
6/16/2011	1:41:06 PM	Tube furnace set to 200
6/16/2011	1:42:27 PM	Helium valve closed
6/16/2011	1:42:27 PM	BCl3 valve closed
6/16/2011	1:42:27 PM	PH3 valve closed
6/16/2011	1:42:27 PM	SiCl4 pre valve closed
6/16/2011	1:42:27 PM	SiCl4 post valve closed
6/16/2011	1:42:27 PM	Main Vac valve closed
6/16/2011	1:42:27 PM	Bypass valve closed
6/16/2011	1:42:27 PM	H2 valve opened
6/16/2011	1:42:27 PM	Bubbler valve opened
6/16/2011	1:42:27 PM	Helium MFC set to  0.000000
6/16/2011	1:42:27 PM	H2 MFC set to  400.000000
6/16/2011	1:42:27 PM	BCl3 MFC set to  0.000000
6/16/2011	1:42:27 PM	PHl3 MFC set to  0.000000
6/16/2011	1:42:27 PM	SiCl4 MFC set to  0.000000
6/16/2011	1:42:27 PM	Bypass solenoid MFC set to  0.000000
6/16/2011	1:42:27 PM	Tube furnace set to 1000
6/16/2011	2:02:27 PM	Helium valve closed
6/16/2011	2:02:27 PM	BCl3 valve closed
6/16/2011	2:02:27 PM	PH3 valve closed
6/16/2011	2:02:27 PM	SiCl4 pre valve closed
6/16/2011	2:02:27 PM	SiCl4 post valve closed
6/16/2011	2:02:27 PM	Main Vac valve closed
6/16/2011	2:02:27 PM	Bypass valve closed
6/16/2011	2:02:27 PM	H2 valve opened
6/16/2011	2:02:27 PM	Bubbler valve opened
6/16/2011	2:02:27 PM	Helium MFC set to  0.000000
6/16/2011	2:02:27 PM	H2 MFC set to  500.000000
6/16/2011	2:02:27 PM	BCl3 MFC set to  0.000000
6/16/2011	2:02:27 PM	PHl3 MFC set to  0.000000
6/16/2011	2:02:27 PM	SiCl4 MFC set to  0.000000
6/16/2011	2:02:27 PM	Bypass solenoid MFC set to  0.000000
6/16/2011	2:02:27 PM	Tube furnace set to 1000
6/16/2011	2:22:27 PM	H2 valve closed
6/16/2011	2:22:27 PM	BCl3 valve closed
6/16/2011	2:22:27 PM	PH3 valve closed
6/16/2011	2:22:27 PM	SiCl4 pre valve closed
6/16/2011	2:22:27 PM	SiCl4 post valve closed
6/16/2011	2:22:27 PM	Main Vac valve closed
6/16/2011	2:22:27 PM	Bypass valve closed
6/16/2011	2:22:27 PM	Helium valve opened
6/16/2011	2:22:27 PM	Bubbler valve opened
6/16/2011	2:22:27 PM	Helium MFC set to  400.000000
6/16/2011	2:22:27 PM	H2 MFC set to  0.000000
6/16/2011	2:22:27 PM	BCl3 MFC set to  0.000000
6/16/2011	2:22:27 PM	PHl3 MFC set to  0.000000
6/16/2011	2:22:27 PM	SiCl4 MFC set to  0.000000
6/16/2011	2:22:27 PM	Bypass solenoid MFC set to  0.000000
6/16/2011	2:22:27 PM	Tube furnace set to 0
6/16/2011	2:22:27 PM	Helium valve closed
6/16/2011	2:22:27 PM	H2 valve closed
6/16/2011	2:22:27 PM	BCl3 valve closed
6/16/2011	2:22:27 PM	PH3 valve closed
6/16/2011	2:22:27 PM	SiCl4 pre valve closed
6/16/2011	2:22:27 PM	SiCl4 post valve closed
6/16/2011	2:22:27 PM	Main Vac valve closed
6/16/2011	2:22:27 PM	Bubbler valve closed
6/16/2011	2:22:28 PM	Bypass valve closed
6/16/2011	2:22:28 PM	Helium MFC set to  0.000000
6/16/2011	2:22:28 PM	H2 MFC set to  0.000000
6/16/2011	2:22:28 PM	BCl3 MFC set to  0.000000
6/16/2011	2:22:28 PM	PHl3 MFC set to  0.000000
6/16/2011	2:22:28 PM	SiCl4 MFC set to  0.000000
6/16/2011	2:22:28 PM	Bypass solenoid MFC set to  760.000000
6/16/2011	2:22:28 PM	Tube furnace set to 0
6/16/2011	2:22:28 PM	Baratron reads 749.484945 Torr and NaOH valve is open.  Emergency exit.
6/16/2011	2:23:42 PM	Run aborted at 2:23 PM
6/16/2011	2:24:02 PM	Helium MFC set to  200.000000
6/16/2011	2:24:07 PM	Helium valve closed
6/16/2011	2:24:09 PM	Helium valve opened
6/16/2011	2:24:16 PM	Bubbler valve closed
6/16/2011	2:24:18 PM	Bubbler valve opened
6/16/2011	2:24:24 PM	Helium MFC set to  500.000000
6/16/2011	2:50:34 PM	Helium MFC set to  100.000000
6/16/2011	2:50:35 PM	Bubbler valve closed
6/16/2011	2:50:37 PM	Helium valve closed
6/16/2011	2:58:41 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/16/2011	2:58:41 PM	Recipe started at 2:58 PM
6/16/2011	2:58:41 PM	H2 valve closed
6/16/2011	2:58:41 PM	BCl3 valve closed
6/16/2011	2:58:41 PM	PH3 valve closed
6/16/2011	2:58:41 PM	SiCl4 pre valve closed
6/16/2011	2:58:41 PM	SiCl4 post valve closed
6/16/2011	2:58:41 PM	Main Vac valve closed
6/16/2011	2:58:41 PM	Bypass valve closed
6/16/2011	2:58:41 PM	Bubbler valve closed
6/16/2011	2:58:41 PM	Helium valve opened
6/16/2011	2:58:41 PM	Helium MFC set to  500.000000
6/16/2011	2:58:41 PM	H2 MFC set to  0.000000
6/16/2011	2:58:41 PM	BCl3 MFC set to  0.000000
6/16/2011	2:58:41 PM	PHl3 MFC set to  0.000000
6/16/2011	2:58:41 PM	SiCl4 MFC set to  0.000000
6/16/2011	2:58:41 PM	Bypass solenoid MFC set to  0.000000
6/16/2011	2:58:42 PM	Tube furnace set to 0
6/16/2011	2:58:46 PM	Helium valve closed
6/16/2011	2:58:46 PM	H2 valve closed
6/16/2011	2:58:46 PM	BCl3 valve closed
6/16/2011	2:58:46 PM	PH3 valve closed
6/16/2011	2:58:46 PM	SiCl4 pre valve closed
6/16/2011	2:58:46 PM	SiCl4 post valve closed
6/16/2011	2:58:46 PM	Main Vac valve closed
6/16/2011	2:58:46 PM	Bypass valve closed
6/16/2011	2:58:46 PM	Bubbler valve closed
6/16/2011	2:58:46 PM	Helium MFC set to  0.000000
6/16/2011	2:58:46 PM	H2 MFC set to  0.000000
6/16/2011	2:58:46 PM	BCl3 MFC set to  0.000000
6/16/2011	2:58:46 PM	PHl3 MFC set to  0.000000
6/16/2011	2:58:46 PM	SiCl4 MFC set to  0.000000
6/16/2011	2:58:46 PM	Bypass solenoid MFC set to  0.000000
6/16/2011	2:58:46 PM	Tube furnace set to 0
6/16/2011	2:58:47 PM	Run finished at 2:58 PM
6/16/2011	2:58:47 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/16/2011	3:03:24 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/16/2011	3:03:24 PM	Recipe started at 3:03 PM
6/16/2011	3:03:24 PM	Helium valve closed
6/16/2011	3:03:24 PM	H2 valve closed
6/16/2011	3:03:24 PM	BCl3 valve closed
6/16/2011	3:03:24 PM	PH3 valve closed
6/16/2011	3:03:24 PM	SiCl4 pre valve closed
6/16/2011	3:03:24 PM	SiCl4 post valve closed
6/16/2011	3:03:24 PM	Main Vac valve closed
6/16/2011	3:03:24 PM	Bubbler valve closed
6/16/2011	3:03:24 PM	Bypass valve opened
6/16/2011	3:03:24 PM	Helium MFC set to  0.000000
6/16/2011	3:03:24 PM	H2 MFC set to  0.000000
6/16/2011	3:03:24 PM	BCl3 MFC set to  0.000000
6/16/2011	3:03:24 PM	PHl3 MFC set to  0.000000
6/16/2011	3:03:24 PM	SiCl4 MFC set to  0.000000
6/16/2011	3:03:24 PM	Bypass solenoid MFC set to  0.000000
6/16/2011	3:03:24 PM	Tube furnace set to 0
6/16/2011	3:03:55 PM	Helium valve closed
6/16/2011	3:03:55 PM	H2 valve closed
6/16/2011	3:03:55 PM	BCl3 valve closed
6/16/2011	3:03:55 PM	PH3 valve closed
6/16/2011	3:03:55 PM	SiCl4 pre valve closed
6/16/2011	3:03:55 PM	SiCl4 post valve closed
6/16/2011	3:03:55 PM	Bubbler valve closed
6/16/2011	3:03:55 PM	Main Vac valve opened
6/16/2011	3:03:55 PM	Bypass valve opened
6/16/2011	3:03:55 PM	Helium MFC set to  0.000000
6/16/2011	3:03:55 PM	H2 MFC set to  0.000000
6/16/2011	3:03:55 PM	BCl3 MFC set to  0.000000
6/16/2011	3:03:55 PM	PHl3 MFC set to  0.000000
6/16/2011	3:03:55 PM	SiCl4 MFC set to  0.000000
6/16/2011	3:03:55 PM	Bypass solenoid MFC set to  0.000000
6/16/2011	3:03:55 PM	Tube furnace set to 0
6/16/2011	3:03:55 PM	Run finished at 3:03 PM
6/16/2011	3:03:55 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/16/2011	3:04:19 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
6/16/2011	3:04:31 PM	Recipe started at 3:04 PM
6/16/2011	3:04:31 PM	Helium valve closed
6/16/2011	3:04:31 PM	H2 valve closed
6/16/2011	3:04:31 PM	BCl3 valve closed
6/16/2011	3:04:31 PM	PH3 valve closed
6/16/2011	3:04:31 PM	SiCl4 pre valve closed
6/16/2011	3:04:31 PM	SiCl4 post valve closed
6/16/2011	3:04:31 PM	Main Vac valve closed
6/16/2011	3:04:31 PM	Bubbler valve closed
6/16/2011	3:04:31 PM	Bypass valve opened
6/16/2011	3:04:31 PM	Helium MFC set to  0.000000
6/16/2011	3:04:31 PM	H2 MFC set to  0.000000
6/16/2011	3:04:31 PM	BCl3 MFC set to  0.000000
6/16/2011	3:04:31 PM	PHl3 MFC set to  0.000000
6/16/2011	3:04:31 PM	SiCl4 MFC set to  0.000000
6/16/2011	3:04:31 PM	Bypass solenoid MFC set to  0.000000
6/16/2011	3:04:31 PM	Tube furnace set to 0
6/16/2011	3:04:31 PM	Helium valve closed
6/16/2011	3:04:31 PM	H2 valve closed
6/16/2011	3:04:31 PM	BCl3 valve closed
6/16/2011	3:04:31 PM	PH3 valve closed
6/16/2011	3:04:31 PM	SiCl4 pre valve closed
6/16/2011	3:04:31 PM	SiCl4 post valve closed
6/16/2011	3:04:31 PM	Bubbler valve closed
6/16/2011	3:04:31 PM	Main Vac valve opened
6/16/2011	3:04:31 PM	Bypass valve opened
6/16/2011	3:04:31 PM	Helium MFC set to  0.000000
6/16/2011	3:04:31 PM	H2 MFC set to  0.000000
6/16/2011	3:04:31 PM	BCl3 MFC set to  0.000000
6/16/2011	3:04:31 PM	PHl3 MFC set to  0.000000
6/16/2011	3:04:31 PM	SiCl4 MFC set to  0.000000
6/16/2011	3:04:31 PM	Bypass solenoid MFC set to  0.000000
6/16/2011	3:04:31 PM	Tube furnace set to 0
6/16/2011	3:05:31 PM	H2 valve closed
6/16/2011	3:05:31 PM	BCl3 valve closed
6/16/2011	3:05:31 PM	PH3 valve closed
6/16/2011	3:05:31 PM	SiCl4 pre valve closed
6/16/2011	3:05:31 PM	SiCl4 post valve closed
6/16/2011	3:05:31 PM	Bubbler valve closed
6/16/2011	3:05:31 PM	Helium valve opened
6/16/2011	3:05:31 PM	Main Vac valve opened
6/16/2011	3:05:31 PM	Bypass valve opened
6/16/2011	3:05:31 PM	Helium MFC set to  100.000000
6/16/2011	3:05:31 PM	H2 MFC set to  0.000000
6/16/2011	3:05:31 PM	BCl3 MFC set to  0.000000
6/16/2011	3:05:31 PM	PHl3 MFC set to  0.000000
6/16/2011	3:05:31 PM	SiCl4 MFC set to  0.000000
6/16/2011	3:05:31 PM	Bypass solenoid MFC set to  0.000000
6/16/2011	3:05:32 PM	Tube furnace set to 0
6/16/2011	3:06:32 PM	Helium valve closed
6/16/2011	3:06:32 PM	H2 valve closed
6/16/2011	3:06:32 PM	BCl3 valve closed
6/16/2011	3:06:32 PM	PH3 valve closed
6/16/2011	3:06:32 PM	SiCl4 pre valve closed
6/16/2011	3:06:32 PM	SiCl4 post valve closed
6/16/2011	3:06:32 PM	Bubbler valve closed
6/16/2011	3:06:32 PM	Main Vac valve opened
6/16/2011	3:06:32 PM	Bypass valve opened
6/16/2011	3:06:32 PM	Helium MFC set to  0.000000
6/16/2011	3:06:32 PM	H2 MFC set to  0.000000
6/16/2011	3:06:32 PM	BCl3 MFC set to  0.000000
6/16/2011	3:06:32 PM	PHl3 MFC set to  0.000000
6/16/2011	3:06:32 PM	SiCl4 MFC set to  0.000000
6/16/2011	3:06:32 PM	Bypass solenoid MFC set to  0.000000
6/16/2011	3:06:32 PM	Tube furnace set to 0
6/16/2011	3:07:32 PM	H2 valve closed
6/16/2011	3:07:32 PM	BCl3 valve closed
6/16/2011	3:07:32 PM	PH3 valve closed
6/16/2011	3:07:32 PM	SiCl4 pre valve closed
6/16/2011	3:07:32 PM	SiCl4 post valve closed
6/16/2011	3:07:32 PM	Bubbler valve closed
6/16/2011	3:07:32 PM	Helium valve opened
6/16/2011	3:07:32 PM	Main Vac valve opened
6/16/2011	3:07:32 PM	Bypass valve opened
6/16/2011	3:07:32 PM	Helium MFC set to  100.000000
6/16/2011	3:07:32 PM	H2 MFC set to  0.000000
6/16/2011	3:07:32 PM	BCl3 MFC set to  0.000000
6/16/2011	3:07:32 PM	PHl3 MFC set to  0.000000
6/16/2011	3:07:32 PM	SiCl4 MFC set to  0.000000
6/16/2011	3:07:32 PM	Bypass solenoid MFC set to  0.000000
6/16/2011	3:07:32 PM	Tube furnace set to 0
6/16/2011	3:08:32 PM	Helium valve closed
6/16/2011	3:08:32 PM	H2 valve closed
6/16/2011	3:08:32 PM	BCl3 valve closed
6/16/2011	3:08:32 PM	PH3 valve closed
6/16/2011	3:08:32 PM	SiCl4 pre valve closed
6/16/2011	3:08:32 PM	SiCl4 post valve closed
6/16/2011	3:08:32 PM	Bubbler valve closed
6/16/2011	3:08:32 PM	Main Vac valve opened
6/16/2011	3:08:32 PM	Bypass valve opened
6/16/2011	3:08:32 PM	Helium MFC set to  0.000000
6/16/2011	3:08:32 PM	H2 MFC set to  0.000000
6/16/2011	3:08:32 PM	BCl3 MFC set to  0.000000
6/16/2011	3:08:32 PM	PHl3 MFC set to  0.000000
6/16/2011	3:08:32 PM	SiCl4 MFC set to  0.000000
6/16/2011	3:08:32 PM	Bypass solenoid MFC set to  0.000000
6/16/2011	3:08:32 PM	Tube furnace set to 0
6/16/2011	3:09:32 PM	H2 valve closed
6/16/2011	3:09:32 PM	BCl3 valve closed
6/16/2011	3:09:32 PM	PH3 valve closed
6/16/2011	3:09:32 PM	SiCl4 pre valve closed
6/16/2011	3:09:32 PM	SiCl4 post valve closed
6/16/2011	3:09:32 PM	Bubbler valve closed
6/16/2011	3:09:32 PM	Helium valve opened
6/16/2011	3:09:32 PM	Main Vac valve opened
6/16/2011	3:09:32 PM	Bypass valve opened
6/16/2011	3:09:32 PM	Helium MFC set to  100.000000
6/16/2011	3:09:32 PM	H2 MFC set to  0.000000
6/16/2011	3:09:32 PM	BCl3 MFC set to  0.000000
6/16/2011	3:09:32 PM	PHl3 MFC set to  0.000000
6/16/2011	3:09:32 PM	SiCl4 MFC set to  0.000000
6/16/2011	3:09:32 PM	Bypass solenoid MFC set to  0.000000
6/16/2011	3:09:32 PM	Tube furnace set to 0
6/16/2011	3:10:33 PM	Helium valve closed
6/16/2011	3:10:33 PM	H2 valve closed
6/16/2011	3:10:33 PM	BCl3 valve closed
6/16/2011	3:10:33 PM	PH3 valve closed
6/16/2011	3:10:33 PM	SiCl4 pre valve closed
6/16/2011	3:10:33 PM	SiCl4 post valve closed
6/16/2011	3:10:33 PM	Bubbler valve closed
6/16/2011	3:10:33 PM	Main Vac valve opened
6/16/2011	3:10:33 PM	Bypass valve opened
6/16/2011	3:10:33 PM	Helium MFC set to  0.000000
6/16/2011	3:10:33 PM	H2 MFC set to  0.000000
6/16/2011	3:10:33 PM	BCl3 MFC set to  0.000000
6/16/2011	3:10:33 PM	PHl3 MFC set to  0.000000
6/16/2011	3:10:33 PM	SiCl4 MFC set to  0.000000
6/16/2011	3:10:33 PM	Bypass solenoid MFC set to  0.000000
6/16/2011	3:10:33 PM	Tube furnace set to 0
6/16/2011	3:11:33 PM	H2 valve closed
6/16/2011	3:11:33 PM	BCl3 valve closed
6/16/2011	3:11:33 PM	PH3 valve closed
6/16/2011	3:11:33 PM	SiCl4 pre valve closed
6/16/2011	3:11:33 PM	SiCl4 post valve closed
6/16/2011	3:11:33 PM	Bubbler valve closed
6/16/2011	3:11:33 PM	Helium valve opened
6/16/2011	3:11:33 PM	Main Vac valve opened
6/16/2011	3:11:33 PM	Bypass valve opened
6/16/2011	3:11:33 PM	Helium MFC set to  100.000000
6/16/2011	3:11:33 PM	H2 MFC set to  0.000000
6/16/2011	3:11:33 PM	BCl3 MFC set to  0.000000
6/16/2011	3:11:33 PM	PHl3 MFC set to  0.000000
6/16/2011	3:11:33 PM	SiCl4 MFC set to  0.000000
6/16/2011	3:11:33 PM	Bypass solenoid MFC set to  0.000000
6/16/2011	3:11:33 PM	Tube furnace set to 0
6/16/2011	3:12:33 PM	Helium valve closed
6/16/2011	3:12:33 PM	H2 valve closed
6/16/2011	3:12:33 PM	BCl3 valve closed
6/16/2011	3:12:33 PM	PH3 valve closed
6/16/2011	3:12:33 PM	SiCl4 pre valve closed
6/16/2011	3:12:33 PM	SiCl4 post valve closed
6/16/2011	3:12:33 PM	Bubbler valve closed
6/16/2011	3:12:33 PM	Main Vac valve opened
6/16/2011	3:12:33 PM	Bypass valve opened
6/16/2011	3:12:33 PM	Helium MFC set to  0.000000
6/16/2011	3:12:33 PM	H2 MFC set to  0.000000
6/16/2011	3:12:33 PM	BCl3 MFC set to  0.000000
6/16/2011	3:12:33 PM	PHl3 MFC set to  0.000000
6/16/2011	3:12:33 PM	SiCl4 MFC set to  0.000000
6/16/2011	3:12:33 PM	Bypass solenoid MFC set to  0.000000
6/16/2011	3:12:33 PM	Tube furnace set to 0
6/16/2011	3:13:33 PM	H2 valve closed
6/16/2011	3:13:33 PM	BCl3 valve closed
6/16/2011	3:13:33 PM	PH3 valve closed
6/16/2011	3:13:33 PM	SiCl4 pre valve closed
6/16/2011	3:13:33 PM	SiCl4 post valve closed
6/16/2011	3:13:33 PM	Bubbler valve closed
6/16/2011	3:13:33 PM	Helium valve opened
6/16/2011	3:13:33 PM	Main Vac valve opened
6/16/2011	3:13:33 PM	Bypass valve opened
6/16/2011	3:13:33 PM	Helium MFC set to  100.000000
6/16/2011	3:13:33 PM	H2 MFC set to  0.000000
6/16/2011	3:13:33 PM	BCl3 MFC set to  0.000000
6/16/2011	3:13:33 PM	PHl3 MFC set to  0.000000
6/16/2011	3:13:33 PM	SiCl4 MFC set to  0.000000
6/16/2011	3:13:33 PM	Bypass solenoid MFC set to  0.000000
6/16/2011	3:13:33 PM	Tube furnace set to 0
6/16/2011	3:14:33 PM	Helium valve closed
6/16/2011	3:14:33 PM	H2 valve closed
6/16/2011	3:14:33 PM	BCl3 valve closed
6/16/2011	3:14:33 PM	PH3 valve closed
6/16/2011	3:14:33 PM	SiCl4 pre valve closed
6/16/2011	3:14:33 PM	SiCl4 post valve closed
6/16/2011	3:14:33 PM	Bubbler valve closed
6/16/2011	3:14:33 PM	Main Vac valve opened
6/16/2011	3:14:33 PM	Bypass valve opened
6/16/2011	3:14:33 PM	Helium MFC set to  0.000000
6/16/2011	3:14:33 PM	H2 MFC set to  0.000000
6/16/2011	3:14:33 PM	BCl3 MFC set to  0.000000
6/16/2011	3:14:33 PM	PHl3 MFC set to  0.000000
6/16/2011	3:14:33 PM	SiCl4 MFC set to  0.000000
6/16/2011	3:14:33 PM	Bypass solenoid MFC set to  0.000000
6/16/2011	3:14:34 PM	Tube furnace set to 0
6/16/2011	3:15:34 PM	H2 valve closed
6/16/2011	3:15:34 PM	BCl3 valve closed
6/16/2011	3:15:34 PM	PH3 valve closed
6/16/2011	3:15:34 PM	SiCl4 pre valve closed
6/16/2011	3:15:34 PM	SiCl4 post valve closed
6/16/2011	3:15:34 PM	Bubbler valve closed
6/16/2011	3:15:34 PM	Helium valve opened
6/16/2011	3:15:34 PM	Main Vac valve opened
6/16/2011	3:15:34 PM	Bypass valve opened
6/16/2011	3:15:34 PM	Helium MFC set to  100.000000
6/16/2011	3:15:34 PM	H2 MFC set to  0.000000
6/16/2011	3:15:34 PM	BCl3 MFC set to  0.000000
6/16/2011	3:15:34 PM	PHl3 MFC set to  0.000000
6/16/2011	3:15:34 PM	SiCl4 MFC set to  0.000000
6/16/2011	3:15:34 PM	Bypass solenoid MFC set to  0.000000
6/16/2011	3:15:34 PM	Tube furnace set to 0
6/16/2011	3:16:34 PM	Helium valve closed
6/16/2011	3:16:34 PM	H2 valve closed
6/16/2011	3:16:34 PM	BCl3 valve closed
6/16/2011	3:16:34 PM	PH3 valve closed
6/16/2011	3:16:34 PM	SiCl4 pre valve closed
6/16/2011	3:16:34 PM	SiCl4 post valve closed
6/16/2011	3:16:34 PM	Bubbler valve closed
6/16/2011	3:16:34 PM	Main Vac valve opened
6/16/2011	3:16:34 PM	Bypass valve opened
6/16/2011	3:16:34 PM	Helium MFC set to  0.000000
6/16/2011	3:16:34 PM	H2 MFC set to  0.000000
6/16/2011	3:16:34 PM	BCl3 MFC set to  0.000000
6/16/2011	3:16:34 PM	PHl3 MFC set to  0.000000
6/16/2011	3:16:34 PM	SiCl4 MFC set to  0.000000
6/16/2011	3:16:34 PM	Bypass solenoid MFC set to  0.000000
6/16/2011	3:16:34 PM	Tube furnace set to 0
6/16/2011	3:17:34 PM	H2 valve closed
6/16/2011	3:17:34 PM	BCl3 valve closed
6/16/2011	3:17:34 PM	PH3 valve closed
6/16/2011	3:17:34 PM	SiCl4 pre valve closed
6/16/2011	3:17:34 PM	SiCl4 post valve closed
6/16/2011	3:17:34 PM	Bubbler valve closed
6/16/2011	3:17:34 PM	Helium valve opened
6/16/2011	3:17:34 PM	Main Vac valve opened
6/16/2011	3:17:34 PM	Bypass valve opened
6/16/2011	3:17:34 PM	Helium MFC set to  100.000000
6/16/2011	3:17:34 PM	H2 MFC set to  0.000000
6/16/2011	3:17:34 PM	BCl3 MFC set to  0.000000
6/16/2011	3:17:34 PM	PHl3 MFC set to  0.000000
6/16/2011	3:17:34 PM	SiCl4 MFC set to  0.000000
6/16/2011	3:17:34 PM	Bypass solenoid MFC set to  0.000000
6/16/2011	3:17:34 PM	Tube furnace set to 0
6/16/2011	3:18:34 PM	Helium valve closed
6/16/2011	3:18:34 PM	H2 valve closed
6/16/2011	3:18:34 PM	BCl3 valve closed
6/16/2011	3:18:34 PM	PH3 valve closed
6/16/2011	3:18:34 PM	SiCl4 pre valve closed
6/16/2011	3:18:34 PM	SiCl4 post valve closed
6/16/2011	3:18:34 PM	Bubbler valve closed
6/16/2011	3:18:34 PM	Main Vac valve opened
6/16/2011	3:18:34 PM	Bypass valve opened
6/16/2011	3:18:34 PM	Helium MFC set to  0.000000
6/16/2011	3:18:34 PM	H2 MFC set to  0.000000
6/16/2011	3:18:34 PM	BCl3 MFC set to  0.000000
6/16/2011	3:18:34 PM	PHl3 MFC set to  0.000000
6/16/2011	3:18:34 PM	SiCl4 MFC set to  0.000000
6/16/2011	3:18:34 PM	Bypass solenoid MFC set to  0.000000
6/16/2011	3:18:34 PM	Tube furnace set to 0
6/16/2011	3:19:34 PM	H2 valve closed
6/16/2011	3:19:34 PM	BCl3 valve closed
6/16/2011	3:19:34 PM	PH3 valve closed
6/16/2011	3:19:34 PM	SiCl4 pre valve closed
6/16/2011	3:19:34 PM	SiCl4 post valve closed
6/16/2011	3:19:34 PM	Bubbler valve closed
6/16/2011	3:19:34 PM	Helium valve opened
6/16/2011	3:19:34 PM	Main Vac valve opened
6/16/2011	3:19:34 PM	Bypass valve opened
6/16/2011	3:19:34 PM	Helium MFC set to  100.000000
6/16/2011	3:19:34 PM	H2 MFC set to  0.000000
6/16/2011	3:19:34 PM	BCl3 MFC set to  0.000000
6/16/2011	3:19:34 PM	PHl3 MFC set to  0.000000
6/16/2011	3:19:34 PM	SiCl4 MFC set to  0.000000
6/16/2011	3:19:34 PM	Bypass solenoid MFC set to  0.000000
6/16/2011	3:19:35 PM	Tube furnace set to 0
6/16/2011	3:20:35 PM	Helium valve closed
6/16/2011	3:20:35 PM	H2 valve closed
6/16/2011	3:20:35 PM	BCl3 valve closed
6/16/2011	3:20:35 PM	PH3 valve closed
6/16/2011	3:20:35 PM	SiCl4 pre valve closed
6/16/2011	3:20:35 PM	SiCl4 post valve closed
6/16/2011	3:20:35 PM	Bubbler valve closed
6/16/2011	3:20:35 PM	Main Vac valve opened
6/16/2011	3:20:35 PM	Bypass valve opened
6/16/2011	3:20:35 PM	Helium MFC set to  0.000000
6/16/2011	3:20:35 PM	H2 MFC set to  0.000000
6/16/2011	3:20:35 PM	BCl3 MFC set to  0.000000
6/16/2011	3:20:35 PM	PHl3 MFC set to  0.000000
6/16/2011	3:20:35 PM	SiCl4 MFC set to  0.000000
6/16/2011	3:20:35 PM	Bypass solenoid MFC set to  0.000000
6/16/2011	3:20:35 PM	Tube furnace set to 0
6/16/2011	3:21:35 PM	H2 valve closed
6/16/2011	3:21:35 PM	BCl3 valve closed
6/16/2011	3:21:35 PM	PH3 valve closed
6/16/2011	3:21:35 PM	SiCl4 pre valve closed
6/16/2011	3:21:35 PM	SiCl4 post valve closed
6/16/2011	3:21:35 PM	Bubbler valve closed
6/16/2011	3:21:35 PM	Helium valve opened
6/16/2011	3:21:35 PM	Main Vac valve opened
6/16/2011	3:21:35 PM	Bypass valve opened
6/16/2011	3:21:35 PM	Helium MFC set to  100.000000
6/16/2011	3:21:35 PM	H2 MFC set to  0.000000
6/16/2011	3:21:35 PM	BCl3 MFC set to  0.000000
6/16/2011	3:21:35 PM	PHl3 MFC set to  0.000000
6/16/2011	3:21:35 PM	SiCl4 MFC set to  0.000000
6/16/2011	3:21:35 PM	Bypass solenoid MFC set to  0.000000
6/16/2011	3:21:35 PM	Tube furnace set to 0
6/16/2011	3:22:35 PM	Helium valve closed
6/16/2011	3:22:35 PM	H2 valve closed
6/16/2011	3:22:35 PM	BCl3 valve closed
6/16/2011	3:22:35 PM	PH3 valve closed
6/16/2011	3:22:35 PM	SiCl4 pre valve closed
6/16/2011	3:22:35 PM	SiCl4 post valve closed
6/16/2011	3:22:35 PM	Bubbler valve closed
6/16/2011	3:22:35 PM	Main Vac valve opened
6/16/2011	3:22:35 PM	Bypass valve opened
6/16/2011	3:22:35 PM	Helium MFC set to  0.000000
6/16/2011	3:22:35 PM	H2 MFC set to  0.000000
6/16/2011	3:22:35 PM	BCl3 MFC set to  0.000000
6/16/2011	3:22:35 PM	PHl3 MFC set to  0.000000
6/16/2011	3:22:35 PM	SiCl4 MFC set to  0.000000
6/16/2011	3:22:35 PM	Bypass solenoid MFC set to  0.000000
6/16/2011	3:22:35 PM	Tube furnace set to 0
6/16/2011	3:23:35 PM	H2 valve closed
6/16/2011	3:23:35 PM	BCl3 valve closed
6/16/2011	3:23:35 PM	PH3 valve closed
6/16/2011	3:23:35 PM	SiCl4 pre valve closed
6/16/2011	3:23:35 PM	SiCl4 post valve closed
6/16/2011	3:23:35 PM	Bubbler valve closed
6/16/2011	3:23:35 PM	Helium valve opened
6/16/2011	3:23:35 PM	Main Vac valve opened
6/16/2011	3:23:35 PM	Bypass valve opened
6/16/2011	3:23:35 PM	Helium MFC set to  100.000000
6/16/2011	3:23:35 PM	H2 MFC set to  0.000000
6/16/2011	3:23:35 PM	BCl3 MFC set to  0.000000
6/16/2011	3:23:35 PM	PHl3 MFC set to  0.000000
6/16/2011	3:23:35 PM	SiCl4 MFC set to  0.000000
6/16/2011	3:23:35 PM	Bypass solenoid MFC set to  0.000000
6/16/2011	3:23:35 PM	Tube furnace set to 0
6/16/2011	3:24:35 PM	Helium valve closed
6/16/2011	3:24:35 PM	H2 valve closed
6/16/2011	3:24:35 PM	BCl3 valve closed
6/16/2011	3:24:35 PM	PH3 valve closed
6/16/2011	3:24:35 PM	SiCl4 pre valve closed
6/16/2011	3:24:35 PM	SiCl4 post valve closed
6/16/2011	3:24:35 PM	Bubbler valve closed
6/16/2011	3:24:35 PM	Main Vac valve opened
6/16/2011	3:24:35 PM	Bypass valve opened
6/16/2011	3:24:35 PM	Helium MFC set to  0.000000
6/16/2011	3:24:35 PM	H2 MFC set to  0.000000
6/16/2011	3:24:35 PM	BCl3 MFC set to  0.000000
6/16/2011	3:24:35 PM	PHl3 MFC set to  0.000000
6/16/2011	3:24:35 PM	SiCl4 MFC set to  0.000000
6/16/2011	3:24:35 PM	Bypass solenoid MFC set to  0.000000
6/16/2011	3:24:36 PM	Tube furnace set to 0
6/16/2011	3:24:37 PM	Run finished at 3:24 PM
6/16/2011	3:24:37 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
6/16/2011	3:30:54 PM	Helium MFC set to  50.000000
6/16/2011	3:30:59 PM	Helium valve opened
6/16/2011	3:31:44 PM	Helium valve closed
6/16/2011	3:31:51 PM	Helium MFC set to  0.000000
6/16/2011	3:36:31 PM	Recipe started at 3:36 PM
6/16/2011	3:36:31 PM	Helium valve closed
6/16/2011	3:36:31 PM	BCl3 valve closed
6/16/2011	3:36:31 PM	PH3 valve closed
6/16/2011	3:36:31 PM	SiCl4 pre valve closed
6/16/2011	3:36:31 PM	SiCl4 post valve closed
6/16/2011	3:36:31 PM	Main Vac valve closed
6/16/2011	3:36:31 PM	Bypass valve closed
6/16/2011	3:36:31 PM	Bubbler valve closed
6/16/2011	3:36:31 PM	H2 valve opened
6/16/2011	3:36:31 PM	Helium MFC set to  0.000000
6/16/2011	3:36:31 PM	H2 MFC set to  500.000000
6/16/2011	3:36:31 PM	BCl3 MFC set to  0.000000
6/16/2011	3:36:31 PM	PHl3 MFC set to  0.000000
6/16/2011	3:36:31 PM	SiCl4 MFC set to  0.000000
6/16/2011	3:36:31 PM	Bypass solenoid MFC set to  0.000000
6/16/2011	3:36:32 PM	Tube furnace set to 200
6/16/2011	3:37:52 PM	Helium valve closed
6/16/2011	3:37:52 PM	BCl3 valve closed
6/16/2011	3:37:52 PM	PH3 valve closed
6/16/2011	3:37:52 PM	SiCl4 pre valve closed
6/16/2011	3:37:52 PM	SiCl4 post valve closed
6/16/2011	3:37:52 PM	Main Vac valve closed
6/16/2011	3:37:52 PM	Bypass valve closed
6/16/2011	3:37:52 PM	H2 valve opened
6/16/2011	3:37:52 PM	Bubbler valve opened
6/16/2011	3:37:52 PM	Helium MFC set to  0.000000
6/16/2011	3:37:52 PM	H2 MFC set to  400.000000
6/16/2011	3:37:52 PM	BCl3 MFC set to  0.000000
6/16/2011	3:37:52 PM	PHl3 MFC set to  0.000000
6/16/2011	3:37:52 PM	SiCl4 MFC set to  0.000000
6/16/2011	3:37:52 PM	Bypass solenoid MFC set to  0.000000
6/16/2011	3:37:52 PM	Tube furnace set to 800
6/16/2011	3:45:01 PM	Helium valve closed
6/16/2011	3:45:01 PM	H2 valve closed
6/16/2011	3:45:01 PM	BCl3 valve closed
6/16/2011	3:45:01 PM	PH3 valve closed
6/16/2011	3:45:01 PM	SiCl4 pre valve closed
6/16/2011	3:45:01 PM	SiCl4 post valve closed
6/16/2011	3:45:01 PM	Main Vac valve closed
6/16/2011	3:45:01 PM	Bubbler valve closed
6/16/2011	3:45:01 PM	Bypass valve closed
6/16/2011	3:45:01 PM	Helium MFC set to  0.000000
6/16/2011	3:45:01 PM	H2 MFC set to  0.000000
6/16/2011	3:45:01 PM	BCl3 MFC set to  0.000000
6/16/2011	3:45:01 PM	PHl3 MFC set to  0.000000
6/16/2011	3:45:01 PM	SiCl4 MFC set to  0.000000
6/16/2011	3:45:01 PM	Bypass solenoid MFC set to  760.000000
6/16/2011	3:45:02 PM	Tube furnace set to 0
6/16/2011	3:45:02 PM	Baratron reads 749.484945 Torr and NaOH valve is open.  Emergency exit.
6/16/2011	3:59:19 PM	Run aborted at 3:59 PM
6/16/2011	4:00:14 PM	Program exited cleanly
6/16/2011	4:00:16 PM	Program started normally
6/16/2011	4:00:16 PM	Helium valve closed
6/16/2011	4:00:16 PM	H2 valve closed
6/16/2011	4:00:16 PM	BCl3 valve closed
6/16/2011	4:00:16 PM	PH3 valve closed
6/16/2011	4:00:16 PM	SiCl4 pre valve closed
6/16/2011	4:00:16 PM	SiCl4 post valve closed
6/16/2011	4:00:16 PM	Main Vac valve closed
6/16/2011	4:00:16 PM	Bypass valve closed
6/16/2011	4:00:16 PM	Bubbler valve closed
6/16/2011	4:00:16 PM	Helium MFC set to  0.000000
6/16/2011	4:00:16 PM	H2 MFC set to  0.000000
6/16/2011	4:00:16 PM	BCl3 MFC set to  0.000000
6/16/2011	4:00:16 PM	PHl3 MFC set to  0.000000
6/16/2011	4:00:16 PM	SiCl4 MFC set to  0.000000
6/16/2011	4:00:16 PM	Bypass solenoid MFC set to  760.000000
6/16/2011	4:00:16 PM	Tube furnace set to 0
6/16/2011	4:00:22 PM	Program exited cleanly
6/16/2011	4:00:30 PM	Program started normally
6/16/2011	4:00:30 PM	Helium valve closed
6/16/2011	4:00:30 PM	H2 valve closed
6/16/2011	4:00:30 PM	BCl3 valve closed
6/16/2011	4:00:30 PM	PH3 valve closed
6/16/2011	4:00:30 PM	SiCl4 pre valve closed
6/16/2011	4:00:30 PM	SiCl4 post valve closed
6/16/2011	4:00:30 PM	Main Vac valve closed
6/16/2011	4:00:30 PM	Bypass valve closed
6/16/2011	4:00:30 PM	Bubbler valve closed
6/16/2011	4:00:30 PM	Helium MFC set to  0.000000
6/16/2011	4:00:30 PM	H2 MFC set to  0.000000
6/16/2011	4:00:30 PM	BCl3 MFC set to  0.000000
6/16/2011	4:00:30 PM	PHl3 MFC set to  0.000000
6/16/2011	4:00:30 PM	SiCl4 MFC set to  0.000000
6/16/2011	4:00:30 PM	Bypass solenoid MFC set to  760.000000
6/16/2011	4:00:30 PM	Tube furnace set to 0
6/16/2011	4:02:00 PM	Recipe started at 4:02 PM
6/16/2011	4:02:01 PM	Helium valve closed
6/16/2011	4:02:01 PM	BCl3 valve closed
6/16/2011	4:02:01 PM	PH3 valve closed
6/16/2011	4:02:01 PM	SiCl4 pre valve closed
6/16/2011	4:02:01 PM	SiCl4 post valve closed
6/16/2011	4:02:01 PM	Main Vac valve closed
6/16/2011	4:02:01 PM	Bypass valve closed
6/16/2011	4:02:01 PM	Bubbler valve closed
6/16/2011	4:02:01 PM	H2 valve opened
6/16/2011	4:02:01 PM	Helium MFC set to  0.000000
6/16/2011	4:02:01 PM	H2 MFC set to  500.000000
6/16/2011	4:02:01 PM	BCl3 MFC set to  0.000000
6/16/2011	4:02:01 PM	PHl3 MFC set to  0.000000
6/16/2011	4:02:01 PM	SiCl4 MFC set to  0.000000
6/16/2011	4:02:01 PM	Bypass solenoid MFC set to  0.000000
6/16/2011	4:02:01 PM	Tube furnace set to 200
6/16/2011	4:02:04 PM	Helium valve closed
6/16/2011	4:02:04 PM	BCl3 valve closed
6/16/2011	4:02:04 PM	PH3 valve closed
6/16/2011	4:02:04 PM	SiCl4 pre valve closed
6/16/2011	4:02:04 PM	SiCl4 post valve closed
6/16/2011	4:02:04 PM	Main Vac valve closed
6/16/2011	4:02:04 PM	Bypass valve closed
6/16/2011	4:02:04 PM	H2 valve opened
6/16/2011	4:02:04 PM	Bubbler valve opened
6/16/2011	4:02:04 PM	Helium MFC set to  0.000000
6/16/2011	4:02:04 PM	H2 MFC set to  400.000000
6/16/2011	4:02:04 PM	BCl3 MFC set to  0.000000
6/16/2011	4:02:04 PM	PHl3 MFC set to  0.000000
6/16/2011	4:02:04 PM	SiCl4 MFC set to  0.000000
6/16/2011	4:02:04 PM	Bypass solenoid MFC set to  0.000000
6/16/2011	4:02:04 PM	Tube furnace set to 800
6/16/2011	4:12:04 PM	Helium valve closed
6/16/2011	4:12:04 PM	BCl3 valve closed
6/16/2011	4:12:04 PM	PH3 valve closed
6/16/2011	4:12:04 PM	SiCl4 pre valve closed
6/16/2011	4:12:04 PM	SiCl4 post valve closed
6/16/2011	4:12:04 PM	Main Vac valve closed
6/16/2011	4:12:04 PM	Bypass valve closed
6/16/2011	4:12:04 PM	H2 valve opened
6/16/2011	4:12:04 PM	Bubbler valve opened
6/16/2011	4:12:04 PM	Helium MFC set to  0.000000
6/16/2011	4:12:04 PM	H2 MFC set to  500.000000
6/16/2011	4:12:04 PM	BCl3 MFC set to  0.000000
6/16/2011	4:12:04 PM	PHl3 MFC set to  0.000000
6/16/2011	4:12:04 PM	SiCl4 MFC set to  0.000000
6/16/2011	4:12:04 PM	Bypass solenoid MFC set to  0.000000
6/16/2011	4:12:05 PM	Tube furnace set to 800
6/16/2011	4:32:05 PM	H2 valve closed
6/16/2011	4:32:05 PM	BCl3 valve closed
6/16/2011	4:32:05 PM	PH3 valve closed
6/16/2011	4:32:05 PM	SiCl4 pre valve closed
6/16/2011	4:32:05 PM	SiCl4 post valve closed
6/16/2011	4:32:05 PM	Main Vac valve closed
6/16/2011	4:32:05 PM	Bypass valve closed
6/16/2011	4:32:05 PM	Helium valve opened
6/16/2011	4:32:05 PM	Bubbler valve opened
6/16/2011	4:32:05 PM	Helium MFC set to  500.000000
6/16/2011	4:32:05 PM	H2 MFC set to  0.000000
6/16/2011	4:32:05 PM	BCl3 MFC set to  0.000000
6/16/2011	4:32:05 PM	PHl3 MFC set to  0.000000
6/16/2011	4:32:05 PM	SiCl4 MFC set to  0.000000
6/16/2011	4:32:05 PM	Bypass solenoid MFC set to  0.000000
6/16/2011	4:32:05 PM	Tube furnace set to 0
6/16/2011	4:52:05 PM	Helium valve closed
6/16/2011	4:52:05 PM	H2 valve closed
6/16/2011	4:52:05 PM	BCl3 valve closed
6/16/2011	4:52:05 PM	PH3 valve closed
6/16/2011	4:52:05 PM	SiCl4 pre valve closed
6/16/2011	4:52:05 PM	SiCl4 post valve closed
6/16/2011	4:52:05 PM	Main Vac valve closed
6/16/2011	4:52:05 PM	Bypass valve closed
6/16/2011	4:52:05 PM	Bubbler valve closed
6/16/2011	4:52:05 PM	Helium MFC set to  0.000000
6/16/2011	4:52:05 PM	H2 MFC set to  0.000000
6/16/2011	4:52:05 PM	BCl3 MFC set to  0.000000
6/16/2011	4:52:05 PM	PHl3 MFC set to  0.000000
6/16/2011	4:52:05 PM	SiCl4 MFC set to  0.000000
6/16/2011	4:52:05 PM	Bypass solenoid MFC set to  0.000000
6/16/2011	4:52:05 PM	Tube furnace set to 0
6/16/2011	4:52:05 PM	Run finished at 4:52 PM
6/16/2011	4:57:36 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/16/2011	4:57:37 PM	Recipe started at 4:57 PM
6/16/2011	4:57:37 PM	H2 valve closed
6/16/2011	4:57:37 PM	BCl3 valve closed
6/16/2011	4:57:37 PM	PH3 valve closed
6/16/2011	4:57:37 PM	SiCl4 pre valve closed
6/16/2011	4:57:37 PM	SiCl4 post valve closed
6/16/2011	4:57:37 PM	Main Vac valve closed
6/16/2011	4:57:37 PM	Bypass valve closed
6/16/2011	4:57:37 PM	Bubbler valve closed
6/16/2011	4:57:37 PM	Helium valve opened
6/16/2011	4:57:37 PM	Helium MFC set to  500.000000
6/16/2011	4:57:37 PM	H2 MFC set to  0.000000
6/16/2011	4:57:37 PM	BCl3 MFC set to  0.000000
6/16/2011	4:57:37 PM	PHl3 MFC set to  0.000000
6/16/2011	4:57:37 PM	SiCl4 MFC set to  0.000000
6/16/2011	4:57:37 PM	Bypass solenoid MFC set to  0.000000
6/16/2011	4:57:37 PM	Tube furnace set to 0
6/16/2011	4:57:40 PM	Helium valve closed
6/16/2011	4:57:40 PM	H2 valve closed
6/16/2011	4:57:40 PM	BCl3 valve closed
6/16/2011	4:57:40 PM	PH3 valve closed
6/16/2011	4:57:40 PM	SiCl4 pre valve closed
6/16/2011	4:57:40 PM	SiCl4 post valve closed
6/16/2011	4:57:40 PM	Main Vac valve closed
6/16/2011	4:57:40 PM	Bypass valve closed
6/16/2011	4:57:40 PM	Bubbler valve closed
6/16/2011	4:57:40 PM	Helium MFC set to  0.000000
6/16/2011	4:57:40 PM	H2 MFC set to  0.000000
6/16/2011	4:57:40 PM	BCl3 MFC set to  0.000000
6/16/2011	4:57:40 PM	PHl3 MFC set to  0.000000
6/16/2011	4:57:40 PM	SiCl4 MFC set to  0.000000
6/16/2011	4:57:40 PM	Bypass solenoid MFC set to  0.000000
6/16/2011	4:57:40 PM	Tube furnace set to 0
6/16/2011	4:57:41 PM	Run finished at 4:57 PM
6/16/2011	4:57:41 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/16/2011	5:00:56 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/16/2011	5:00:56 PM	Recipe started at 5:00 PM
6/16/2011	5:00:56 PM	H2 valve closed
6/16/2011	5:00:56 PM	BCl3 valve closed
6/16/2011	5:00:56 PM	PH3 valve closed
6/16/2011	5:00:56 PM	SiCl4 pre valve closed
6/16/2011	5:00:56 PM	SiCl4 post valve closed
6/16/2011	5:00:56 PM	Main Vac valve closed
6/16/2011	5:00:56 PM	Bypass valve closed
6/16/2011	5:00:56 PM	Bubbler valve closed
6/16/2011	5:00:56 PM	Helium valve opened
6/16/2011	5:00:56 PM	Helium MFC set to  500.000000
6/16/2011	5:00:56 PM	H2 MFC set to  0.000000
6/16/2011	5:00:56 PM	BCl3 MFC set to  0.000000
6/16/2011	5:00:56 PM	PHl3 MFC set to  0.000000
6/16/2011	5:00:56 PM	SiCl4 MFC set to  0.000000
6/16/2011	5:00:56 PM	Bypass solenoid MFC set to  0.000000
6/16/2011	5:00:57 PM	Tube furnace set to 0
6/16/2011	5:00:58 PM	Helium valve closed
6/16/2011	5:00:58 PM	H2 valve closed
6/16/2011	5:00:58 PM	BCl3 valve closed
6/16/2011	5:00:58 PM	PH3 valve closed
6/16/2011	5:00:58 PM	SiCl4 pre valve closed
6/16/2011	5:00:58 PM	SiCl4 post valve closed
6/16/2011	5:00:58 PM	Main Vac valve closed
6/16/2011	5:00:58 PM	Bypass valve closed
6/16/2011	5:00:58 PM	Bubbler valve closed
6/16/2011	5:00:58 PM	Helium MFC set to  0.000000
6/16/2011	5:00:58 PM	H2 MFC set to  0.000000
6/16/2011	5:00:58 PM	BCl3 MFC set to  0.000000
6/16/2011	5:00:58 PM	PHl3 MFC set to  0.000000
6/16/2011	5:00:58 PM	SiCl4 MFC set to  0.000000
6/16/2011	5:00:58 PM	Bypass solenoid MFC set to  0.000000
6/16/2011	5:00:58 PM	Tube furnace set to 0
6/16/2011	5:00:59 PM	Run finished at 5:00 PM
6/16/2011	5:00:59 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/16/2011	5:09:26 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/16/2011	5:09:27 PM	Recipe started at 5:09 PM
6/16/2011	5:09:27 PM	Helium valve closed
6/16/2011	5:09:27 PM	H2 valve closed
6/16/2011	5:09:27 PM	BCl3 valve closed
6/16/2011	5:09:27 PM	PH3 valve closed
6/16/2011	5:09:27 PM	SiCl4 pre valve closed
6/16/2011	5:09:27 PM	SiCl4 post valve closed
6/16/2011	5:09:27 PM	Main Vac valve closed
6/16/2011	5:09:27 PM	Bubbler valve closed
6/16/2011	5:09:27 PM	Bypass valve opened
6/16/2011	5:09:27 PM	Helium MFC set to  0.000000
6/16/2011	5:09:27 PM	H2 MFC set to  0.000000
6/16/2011	5:09:27 PM	BCl3 MFC set to  0.000000
6/16/2011	5:09:27 PM	PHl3 MFC set to  0.000000
6/16/2011	5:09:27 PM	SiCl4 MFC set to  0.000000
6/16/2011	5:09:27 PM	Bypass solenoid MFC set to  0.000000
6/16/2011	5:09:27 PM	Tube furnace set to 0
6/16/2011	5:09:58 PM	Helium valve closed
6/16/2011	5:09:59 PM	H2 valve closed
6/16/2011	5:09:59 PM	BCl3 valve closed
6/16/2011	5:09:59 PM	PH3 valve closed
6/16/2011	5:09:59 PM	SiCl4 pre valve closed
6/16/2011	5:09:59 PM	SiCl4 post valve closed
6/16/2011	5:09:59 PM	Bubbler valve closed
6/16/2011	5:09:59 PM	Main Vac valve opened
6/16/2011	5:09:59 PM	Bypass valve opened
6/16/2011	5:09:59 PM	Helium MFC set to  0.000000
6/16/2011	5:09:59 PM	H2 MFC set to  0.000000
6/16/2011	5:09:59 PM	BCl3 MFC set to  0.000000
6/16/2011	5:09:59 PM	PHl3 MFC set to  0.000000
6/16/2011	5:09:59 PM	SiCl4 MFC set to  0.000000
6/16/2011	5:09:59 PM	Bypass solenoid MFC set to  0.000000
6/16/2011	5:09:59 PM	Tube furnace set to 0
6/16/2011	5:09:59 PM	Run finished at 5:09 PM
6/16/2011	5:09:59 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/16/2011	5:10:12 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
6/16/2011	5:10:24 PM	Recipe started at 5:10 PM
6/16/2011	5:10:24 PM	Helium valve closed
6/16/2011	5:10:24 PM	H2 valve closed
6/16/2011	5:10:24 PM	BCl3 valve closed
6/16/2011	5:10:24 PM	PH3 valve closed
6/16/2011	5:10:24 PM	SiCl4 pre valve closed
6/16/2011	5:10:24 PM	SiCl4 post valve closed
6/16/2011	5:10:24 PM	Main Vac valve closed
6/16/2011	5:10:24 PM	Bubbler valve closed
6/16/2011	5:10:24 PM	Bypass valve opened
6/16/2011	5:10:24 PM	Helium MFC set to  0.000000
6/16/2011	5:10:24 PM	H2 MFC set to  0.000000
6/16/2011	5:10:24 PM	BCl3 MFC set to  0.000000
6/16/2011	5:10:24 PM	PHl3 MFC set to  0.000000
6/16/2011	5:10:24 PM	SiCl4 MFC set to  0.000000
6/16/2011	5:10:24 PM	Bypass solenoid MFC set to  0.000000
6/16/2011	5:10:24 PM	Tube furnace set to 0
6/16/2011	5:10:24 PM	Helium valve closed
6/16/2011	5:10:24 PM	H2 valve closed
6/16/2011	5:10:24 PM	BCl3 valve closed
6/16/2011	5:10:24 PM	PH3 valve closed
6/16/2011	5:10:24 PM	SiCl4 pre valve closed
6/16/2011	5:10:24 PM	SiCl4 post valve closed
6/16/2011	5:10:24 PM	Bubbler valve closed
6/16/2011	5:10:24 PM	Main Vac valve opened
6/16/2011	5:10:24 PM	Bypass valve opened
6/16/2011	5:10:24 PM	Helium MFC set to  0.000000
6/16/2011	5:10:24 PM	H2 MFC set to  0.000000
6/16/2011	5:10:24 PM	BCl3 MFC set to  0.000000
6/16/2011	5:10:24 PM	PHl3 MFC set to  0.000000
6/16/2011	5:10:24 PM	SiCl4 MFC set to  0.000000
6/16/2011	5:10:24 PM	Bypass solenoid MFC set to  0.000000
6/16/2011	5:10:24 PM	Tube furnace set to 0
6/16/2011	5:11:25 PM	H2 valve closed
6/16/2011	5:11:25 PM	BCl3 valve closed
6/16/2011	5:11:25 PM	PH3 valve closed
6/16/2011	5:11:25 PM	SiCl4 pre valve closed
6/16/2011	5:11:25 PM	SiCl4 post valve closed
6/16/2011	5:11:25 PM	Bubbler valve closed
6/16/2011	5:11:25 PM	Helium valve opened
6/16/2011	5:11:25 PM	Main Vac valve opened
6/16/2011	5:11:25 PM	Bypass valve opened
6/16/2011	5:11:25 PM	Helium MFC set to  100.000000
6/16/2011	5:11:25 PM	H2 MFC set to  0.000000
6/16/2011	5:11:25 PM	BCl3 MFC set to  0.000000
6/16/2011	5:11:25 PM	PHl3 MFC set to  0.000000
6/16/2011	5:11:25 PM	SiCl4 MFC set to  0.000000
6/16/2011	5:11:25 PM	Bypass solenoid MFC set to  0.000000
6/16/2011	5:11:25 PM	Tube furnace set to 0
6/16/2011	5:12:25 PM	Helium valve closed
6/16/2011	5:12:25 PM	H2 valve closed
6/16/2011	5:12:25 PM	BCl3 valve closed
6/16/2011	5:12:25 PM	PH3 valve closed
6/16/2011	5:12:25 PM	SiCl4 pre valve closed
6/16/2011	5:12:25 PM	SiCl4 post valve closed
6/16/2011	5:12:25 PM	Bubbler valve closed
6/16/2011	5:12:25 PM	Main Vac valve opened
6/16/2011	5:12:25 PM	Bypass valve opened
6/16/2011	5:12:25 PM	Helium MFC set to  0.000000
6/16/2011	5:12:25 PM	H2 MFC set to  0.000000
6/16/2011	5:12:25 PM	BCl3 MFC set to  0.000000
6/16/2011	5:12:25 PM	PHl3 MFC set to  0.000000
6/16/2011	5:12:25 PM	SiCl4 MFC set to  0.000000
6/16/2011	5:12:25 PM	Bypass solenoid MFC set to  0.000000
6/16/2011	5:12:25 PM	Tube furnace set to 0
6/16/2011	5:13:25 PM	H2 valve closed
6/16/2011	5:13:25 PM	BCl3 valve closed
6/16/2011	5:13:25 PM	PH3 valve closed
6/16/2011	5:13:25 PM	SiCl4 pre valve closed
6/16/2011	5:13:25 PM	SiCl4 post valve closed
6/16/2011	5:13:25 PM	Bubbler valve closed
6/16/2011	5:13:25 PM	Helium valve opened
6/16/2011	5:13:25 PM	Main Vac valve opened
6/16/2011	5:13:25 PM	Bypass valve opened
6/16/2011	5:13:25 PM	Helium MFC set to  100.000000
6/16/2011	5:13:25 PM	H2 MFC set to  0.000000
6/16/2011	5:13:25 PM	BCl3 MFC set to  0.000000
6/16/2011	5:13:25 PM	PHl3 MFC set to  0.000000
6/16/2011	5:13:25 PM	SiCl4 MFC set to  0.000000
6/16/2011	5:13:25 PM	Bypass solenoid MFC set to  0.000000
6/16/2011	5:13:25 PM	Tube furnace set to 0
6/16/2011	5:14:25 PM	Helium valve closed
6/16/2011	5:14:25 PM	H2 valve closed
6/16/2011	5:14:25 PM	BCl3 valve closed
6/16/2011	5:14:25 PM	PH3 valve closed
6/16/2011	5:14:25 PM	SiCl4 pre valve closed
6/16/2011	5:14:25 PM	SiCl4 post valve closed
6/16/2011	5:14:25 PM	Bubbler valve closed
6/16/2011	5:14:25 PM	Main Vac valve opened
6/16/2011	5:14:25 PM	Bypass valve opened
6/16/2011	5:14:25 PM	Helium MFC set to  0.000000
6/16/2011	5:14:25 PM	H2 MFC set to  0.000000
6/16/2011	5:14:25 PM	BCl3 MFC set to  0.000000
6/16/2011	5:14:25 PM	PHl3 MFC set to  0.000000
6/16/2011	5:14:25 PM	SiCl4 MFC set to  0.000000
6/16/2011	5:14:25 PM	Bypass solenoid MFC set to  0.000000
6/16/2011	5:14:25 PM	Tube furnace set to 0
6/16/2011	5:15:25 PM	H2 valve closed
6/16/2011	5:15:25 PM	BCl3 valve closed
6/16/2011	5:15:25 PM	PH3 valve closed
6/16/2011	5:15:25 PM	SiCl4 pre valve closed
6/16/2011	5:15:25 PM	SiCl4 post valve closed
6/16/2011	5:15:25 PM	Bubbler valve closed
6/16/2011	5:15:25 PM	Helium valve opened
6/16/2011	5:15:25 PM	Main Vac valve opened
6/16/2011	5:15:25 PM	Bypass valve opened
6/16/2011	5:15:25 PM	Helium MFC set to  100.000000
6/16/2011	5:15:25 PM	H2 MFC set to  0.000000
6/16/2011	5:15:25 PM	BCl3 MFC set to  0.000000
6/16/2011	5:15:25 PM	PHl3 MFC set to  0.000000
6/16/2011	5:15:25 PM	SiCl4 MFC set to  0.000000
6/16/2011	5:15:25 PM	Bypass solenoid MFC set to  0.000000
6/16/2011	5:15:26 PM	Tube furnace set to 0
6/16/2011	5:16:26 PM	Helium valve closed
6/16/2011	5:16:26 PM	H2 valve closed
6/16/2011	5:16:26 PM	BCl3 valve closed
6/16/2011	5:16:26 PM	PH3 valve closed
6/16/2011	5:16:26 PM	SiCl4 pre valve closed
6/16/2011	5:16:26 PM	SiCl4 post valve closed
6/16/2011	5:16:26 PM	Bubbler valve closed
6/16/2011	5:16:26 PM	Main Vac valve opened
6/16/2011	5:16:26 PM	Bypass valve opened
6/16/2011	5:16:26 PM	Helium MFC set to  0.000000
6/16/2011	5:16:26 PM	H2 MFC set to  0.000000
6/16/2011	5:16:26 PM	BCl3 MFC set to  0.000000
6/16/2011	5:16:26 PM	PHl3 MFC set to  0.000000
6/16/2011	5:16:26 PM	SiCl4 MFC set to  0.000000
6/16/2011	5:16:26 PM	Bypass solenoid MFC set to  0.000000
6/16/2011	5:16:26 PM	Tube furnace set to 0
6/16/2011	5:17:26 PM	H2 valve closed
6/16/2011	5:17:26 PM	BCl3 valve closed
6/16/2011	5:17:26 PM	PH3 valve closed
6/16/2011	5:17:26 PM	SiCl4 pre valve closed
6/16/2011	5:17:26 PM	SiCl4 post valve closed
6/16/2011	5:17:26 PM	Bubbler valve closed
6/16/2011	5:17:26 PM	Helium valve opened
6/16/2011	5:17:26 PM	Main Vac valve opened
6/16/2011	5:17:26 PM	Bypass valve opened
6/16/2011	5:17:26 PM	Helium MFC set to  100.000000
6/16/2011	5:17:26 PM	H2 MFC set to  0.000000
6/16/2011	5:17:26 PM	BCl3 MFC set to  0.000000
6/16/2011	5:17:26 PM	PHl3 MFC set to  0.000000
6/16/2011	5:17:26 PM	SiCl4 MFC set to  0.000000
6/16/2011	5:17:26 PM	Bypass solenoid MFC set to  0.000000
6/16/2011	5:17:26 PM	Tube furnace set to 0
6/16/2011	5:18:26 PM	Helium valve closed
6/16/2011	5:18:26 PM	H2 valve closed
6/16/2011	5:18:26 PM	BCl3 valve closed
6/16/2011	5:18:26 PM	PH3 valve closed
6/16/2011	5:18:26 PM	SiCl4 pre valve closed
6/16/2011	5:18:26 PM	SiCl4 post valve closed
6/16/2011	5:18:26 PM	Bubbler valve closed
6/16/2011	5:18:26 PM	Main Vac valve opened
6/16/2011	5:18:26 PM	Bypass valve opened
6/16/2011	5:18:26 PM	Helium MFC set to  0.000000
6/16/2011	5:18:26 PM	H2 MFC set to  0.000000
6/16/2011	5:18:26 PM	BCl3 MFC set to  0.000000
6/16/2011	5:18:26 PM	PHl3 MFC set to  0.000000
6/16/2011	5:18:26 PM	SiCl4 MFC set to  0.000000
6/16/2011	5:18:26 PM	Bypass solenoid MFC set to  0.000000
6/16/2011	5:18:26 PM	Tube furnace set to 0
6/16/2011	5:19:26 PM	H2 valve closed
6/16/2011	5:19:26 PM	BCl3 valve closed
6/16/2011	5:19:26 PM	PH3 valve closed
6/16/2011	5:19:26 PM	SiCl4 pre valve closed
6/16/2011	5:19:26 PM	SiCl4 post valve closed
6/16/2011	5:19:26 PM	Bubbler valve closed
6/16/2011	5:19:26 PM	Helium valve opened
6/16/2011	5:19:26 PM	Main Vac valve opened
6/16/2011	5:19:26 PM	Bypass valve opened
6/16/2011	5:19:26 PM	Helium MFC set to  100.000000
6/16/2011	5:19:26 PM	H2 MFC set to  0.000000
6/16/2011	5:19:26 PM	BCl3 MFC set to  0.000000
6/16/2011	5:19:26 PM	PHl3 MFC set to  0.000000
6/16/2011	5:19:26 PM	SiCl4 MFC set to  0.000000
6/16/2011	5:19:26 PM	Bypass solenoid MFC set to  0.000000
6/16/2011	5:19:26 PM	Tube furnace set to 0
6/16/2011	5:20:26 PM	Helium valve closed
6/16/2011	5:20:26 PM	H2 valve closed
6/16/2011	5:20:26 PM	BCl3 valve closed
6/16/2011	5:20:26 PM	PH3 valve closed
6/16/2011	5:20:26 PM	SiCl4 pre valve closed
6/16/2011	5:20:26 PM	SiCl4 post valve closed
6/16/2011	5:20:26 PM	Bubbler valve closed
6/16/2011	5:20:26 PM	Main Vac valve opened
6/16/2011	5:20:26 PM	Bypass valve opened
6/16/2011	5:20:26 PM	Helium MFC set to  0.000000
6/16/2011	5:20:26 PM	H2 MFC set to  0.000000
6/16/2011	5:20:26 PM	BCl3 MFC set to  0.000000
6/16/2011	5:20:26 PM	PHl3 MFC set to  0.000000
6/16/2011	5:20:26 PM	SiCl4 MFC set to  0.000000
6/16/2011	5:20:26 PM	Bypass solenoid MFC set to  0.000000
6/16/2011	5:20:27 PM	Tube furnace set to 0
6/16/2011	5:21:27 PM	H2 valve closed
6/16/2011	5:21:27 PM	BCl3 valve closed
6/16/2011	5:21:27 PM	PH3 valve closed
6/16/2011	5:21:27 PM	SiCl4 pre valve closed
6/16/2011	5:21:27 PM	SiCl4 post valve closed
6/16/2011	5:21:27 PM	Bubbler valve closed
6/16/2011	5:21:27 PM	Helium valve opened
6/16/2011	5:21:27 PM	Main Vac valve opened
6/16/2011	5:21:27 PM	Bypass valve opened
6/16/2011	5:21:27 PM	Helium MFC set to  100.000000
6/16/2011	5:21:27 PM	H2 MFC set to  0.000000
6/16/2011	5:21:27 PM	BCl3 MFC set to  0.000000
6/16/2011	5:21:27 PM	PHl3 MFC set to  0.000000
6/16/2011	5:21:27 PM	SiCl4 MFC set to  0.000000
6/16/2011	5:21:27 PM	Bypass solenoid MFC set to  0.000000
6/16/2011	5:21:27 PM	Tube furnace set to 0
6/16/2011	5:22:27 PM	Helium valve closed
6/16/2011	5:22:27 PM	H2 valve closed
6/16/2011	5:22:27 PM	BCl3 valve closed
6/16/2011	5:22:27 PM	PH3 valve closed
6/16/2011	5:22:27 PM	SiCl4 pre valve closed
6/16/2011	5:22:27 PM	SiCl4 post valve closed
6/16/2011	5:22:27 PM	Bubbler valve closed
6/16/2011	5:22:27 PM	Main Vac valve opened
6/16/2011	5:22:27 PM	Bypass valve opened
6/16/2011	5:22:27 PM	Helium MFC set to  0.000000
6/16/2011	5:22:27 PM	H2 MFC set to  0.000000
6/16/2011	5:22:27 PM	BCl3 MFC set to  0.000000
6/16/2011	5:22:27 PM	PHl3 MFC set to  0.000000
6/16/2011	5:22:27 PM	SiCl4 MFC set to  0.000000
6/16/2011	5:22:27 PM	Bypass solenoid MFC set to  0.000000
6/16/2011	5:22:27 PM	Tube furnace set to 0
6/16/2011	5:23:27 PM	H2 valve closed
6/16/2011	5:23:27 PM	BCl3 valve closed
6/16/2011	5:23:27 PM	PH3 valve closed
6/16/2011	5:23:27 PM	SiCl4 pre valve closed
6/16/2011	5:23:27 PM	SiCl4 post valve closed
6/16/2011	5:23:27 PM	Bubbler valve closed
6/16/2011	5:23:27 PM	Helium valve opened
6/16/2011	5:23:27 PM	Main Vac valve opened
6/16/2011	5:23:27 PM	Bypass valve opened
6/16/2011	5:23:27 PM	Helium MFC set to  100.000000
6/16/2011	5:23:27 PM	H2 MFC set to  0.000000
6/16/2011	5:23:27 PM	BCl3 MFC set to  0.000000
6/16/2011	5:23:27 PM	PHl3 MFC set to  0.000000
6/16/2011	5:23:27 PM	SiCl4 MFC set to  0.000000
6/16/2011	5:23:27 PM	Bypass solenoid MFC set to  0.000000
6/16/2011	5:23:27 PM	Tube furnace set to 0
6/16/2011	5:24:27 PM	Helium valve closed
6/16/2011	5:24:27 PM	H2 valve closed
6/16/2011	5:24:27 PM	BCl3 valve closed
6/16/2011	5:24:27 PM	PH3 valve closed
6/16/2011	5:24:27 PM	SiCl4 pre valve closed
6/16/2011	5:24:27 PM	SiCl4 post valve closed
6/16/2011	5:24:27 PM	Bubbler valve closed
6/16/2011	5:24:27 PM	Main Vac valve opened
6/16/2011	5:24:27 PM	Bypass valve opened
6/16/2011	5:24:27 PM	Helium MFC set to  0.000000
6/16/2011	5:24:27 PM	H2 MFC set to  0.000000
6/16/2011	5:24:27 PM	BCl3 MFC set to  0.000000
6/16/2011	5:24:27 PM	PHl3 MFC set to  0.000000
6/16/2011	5:24:27 PM	SiCl4 MFC set to  0.000000
6/16/2011	5:24:27 PM	Bypass solenoid MFC set to  0.000000
6/16/2011	5:24:27 PM	Tube furnace set to 0
6/16/2011	5:25:27 PM	H2 valve closed
6/16/2011	5:25:27 PM	BCl3 valve closed
6/16/2011	5:25:27 PM	PH3 valve closed
6/16/2011	5:25:27 PM	SiCl4 pre valve closed
6/16/2011	5:25:27 PM	SiCl4 post valve closed
6/16/2011	5:25:27 PM	Bubbler valve closed
6/16/2011	5:25:27 PM	Helium valve opened
6/16/2011	5:25:27 PM	Main Vac valve opened
6/16/2011	5:25:27 PM	Bypass valve opened
6/16/2011	5:25:27 PM	Helium MFC set to  100.000000
6/16/2011	5:25:27 PM	H2 MFC set to  0.000000
6/16/2011	5:25:27 PM	BCl3 MFC set to  0.000000
6/16/2011	5:25:27 PM	PHl3 MFC set to  0.000000
6/16/2011	5:25:27 PM	SiCl4 MFC set to  0.000000
6/16/2011	5:25:27 PM	Bypass solenoid MFC set to  0.000000
6/16/2011	5:25:28 PM	Tube furnace set to 0
6/16/2011	5:26:28 PM	Helium valve closed
6/16/2011	5:26:28 PM	H2 valve closed
6/16/2011	5:26:28 PM	BCl3 valve closed
6/16/2011	5:26:28 PM	PH3 valve closed
6/16/2011	5:26:28 PM	SiCl4 pre valve closed
6/16/2011	5:26:28 PM	SiCl4 post valve closed
6/16/2011	5:26:28 PM	Bubbler valve closed
6/16/2011	5:26:28 PM	Main Vac valve opened
6/16/2011	5:26:28 PM	Bypass valve opened
6/16/2011	5:26:28 PM	Helium MFC set to  0.000000
6/16/2011	5:26:28 PM	H2 MFC set to  0.000000
6/16/2011	5:26:28 PM	BCl3 MFC set to  0.000000
6/16/2011	5:26:28 PM	PHl3 MFC set to  0.000000
6/16/2011	5:26:28 PM	SiCl4 MFC set to  0.000000
6/16/2011	5:26:28 PM	Bypass solenoid MFC set to  0.000000
6/16/2011	5:26:28 PM	Tube furnace set to 0
6/16/2011	5:27:28 PM	H2 valve closed
6/16/2011	5:27:28 PM	BCl3 valve closed
6/16/2011	5:27:28 PM	PH3 valve closed
6/16/2011	5:27:28 PM	SiCl4 pre valve closed
6/16/2011	5:27:28 PM	SiCl4 post valve closed
6/16/2011	5:27:28 PM	Bubbler valve closed
6/16/2011	5:27:28 PM	Helium valve opened
6/16/2011	5:27:28 PM	Main Vac valve opened
6/16/2011	5:27:28 PM	Bypass valve opened
6/16/2011	5:27:28 PM	Helium MFC set to  100.000000
6/16/2011	5:27:28 PM	H2 MFC set to  0.000000
6/16/2011	5:27:28 PM	BCl3 MFC set to  0.000000
6/16/2011	5:27:28 PM	PHl3 MFC set to  0.000000
6/16/2011	5:27:28 PM	SiCl4 MFC set to  0.000000
6/16/2011	5:27:28 PM	Bypass solenoid MFC set to  0.000000
6/16/2011	5:27:28 PM	Tube furnace set to 0
6/16/2011	5:28:28 PM	Helium valve closed
6/16/2011	5:28:28 PM	H2 valve closed
6/16/2011	5:28:28 PM	BCl3 valve closed
6/16/2011	5:28:28 PM	PH3 valve closed
6/16/2011	5:28:28 PM	SiCl4 pre valve closed
6/16/2011	5:28:28 PM	SiCl4 post valve closed
6/16/2011	5:28:28 PM	Bubbler valve closed
6/16/2011	5:28:28 PM	Main Vac valve opened
6/16/2011	5:28:28 PM	Bypass valve opened
6/16/2011	5:28:28 PM	Helium MFC set to  0.000000
6/16/2011	5:28:28 PM	H2 MFC set to  0.000000
6/16/2011	5:28:28 PM	BCl3 MFC set to  0.000000
6/16/2011	5:28:28 PM	PHl3 MFC set to  0.000000
6/16/2011	5:28:28 PM	SiCl4 MFC set to  0.000000
6/16/2011	5:28:28 PM	Bypass solenoid MFC set to  0.000000
6/16/2011	5:28:28 PM	Tube furnace set to 0
6/16/2011	5:29:28 PM	H2 valve closed
6/16/2011	5:29:28 PM	BCl3 valve closed
6/16/2011	5:29:28 PM	PH3 valve closed
6/16/2011	5:29:28 PM	SiCl4 pre valve closed
6/16/2011	5:29:28 PM	SiCl4 post valve closed
6/16/2011	5:29:28 PM	Bubbler valve closed
6/16/2011	5:29:28 PM	Helium valve opened
6/16/2011	5:29:28 PM	Main Vac valve opened
6/16/2011	5:29:28 PM	Bypass valve opened
6/16/2011	5:29:28 PM	Helium MFC set to  100.000000
6/16/2011	5:29:28 PM	H2 MFC set to  0.000000
6/16/2011	5:29:28 PM	BCl3 MFC set to  0.000000
6/16/2011	5:29:28 PM	PHl3 MFC set to  0.000000
6/16/2011	5:29:28 PM	SiCl4 MFC set to  0.000000
6/16/2011	5:29:28 PM	Bypass solenoid MFC set to  0.000000
6/16/2011	5:29:28 PM	Tube furnace set to 0
6/16/2011	5:30:28 PM	Helium valve closed
6/16/2011	5:30:28 PM	H2 valve closed
6/16/2011	5:30:28 PM	BCl3 valve closed
6/16/2011	5:30:28 PM	PH3 valve closed
6/16/2011	5:30:28 PM	SiCl4 pre valve closed
6/16/2011	5:30:28 PM	SiCl4 post valve closed
6/16/2011	5:30:28 PM	Bubbler valve closed
6/16/2011	5:30:28 PM	Main Vac valve opened
6/16/2011	5:30:28 PM	Bypass valve opened
6/16/2011	5:30:28 PM	Helium MFC set to  0.000000
6/16/2011	5:30:28 PM	H2 MFC set to  0.000000
6/16/2011	5:30:28 PM	BCl3 MFC set to  0.000000
6/16/2011	5:30:28 PM	PHl3 MFC set to  0.000000
6/16/2011	5:30:28 PM	SiCl4 MFC set to  0.000000
6/16/2011	5:30:28 PM	Bypass solenoid MFC set to  0.000000
6/16/2011	5:30:29 PM	Tube furnace set to 0
6/16/2011	5:30:30 PM	Run finished at 5:30 PM
6/16/2011	5:30:30 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
6/16/2011	5:32:42 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
6/16/2011	5:32:54 PM	Recipe started at 5:32 PM
6/16/2011	5:32:54 PM	Helium valve closed
6/16/2011	5:32:54 PM	H2 valve closed
6/16/2011	5:32:54 PM	BCl3 valve closed
6/16/2011	5:32:54 PM	PH3 valve closed
6/16/2011	5:32:54 PM	SiCl4 pre valve closed
6/16/2011	5:32:54 PM	SiCl4 post valve closed
6/16/2011	5:32:54 PM	Main Vac valve closed
6/16/2011	5:32:54 PM	Bubbler valve closed
6/16/2011	5:32:54 PM	Bypass valve opened
6/16/2011	5:32:54 PM	Helium MFC set to  0.000000
6/16/2011	5:32:54 PM	H2 MFC set to  0.000000
6/16/2011	5:32:54 PM	BCl3 MFC set to  0.000000
6/16/2011	5:32:54 PM	PHl3 MFC set to  0.000000
6/16/2011	5:32:54 PM	SiCl4 MFC set to  0.000000
6/16/2011	5:32:54 PM	Bypass solenoid MFC set to  0.000000
6/16/2011	5:32:55 PM	Tube furnace set to 0
6/16/2011	5:32:55 PM	Helium valve closed
6/16/2011	5:32:55 PM	H2 valve closed
6/16/2011	5:32:55 PM	BCl3 valve closed
6/16/2011	5:32:55 PM	PH3 valve closed
6/16/2011	5:32:55 PM	SiCl4 pre valve closed
6/16/2011	5:32:55 PM	SiCl4 post valve closed
6/16/2011	5:32:55 PM	Bubbler valve closed
6/16/2011	5:32:55 PM	Main Vac valve opened
6/16/2011	5:32:55 PM	Bypass valve opened
6/16/2011	5:32:55 PM	Helium MFC set to  0.000000
6/16/2011	5:32:55 PM	H2 MFC set to  0.000000
6/16/2011	5:32:55 PM	BCl3 MFC set to  0.000000
6/16/2011	5:32:55 PM	PHl3 MFC set to  0.000000
6/16/2011	5:32:55 PM	SiCl4 MFC set to  0.000000
6/16/2011	5:32:55 PM	Bypass solenoid MFC set to  0.000000
6/16/2011	5:32:55 PM	Tube furnace set to 0
6/16/2011	5:33:55 PM	H2 valve closed
6/16/2011	5:33:55 PM	BCl3 valve closed
6/16/2011	5:33:55 PM	PH3 valve closed
6/16/2011	5:33:55 PM	SiCl4 pre valve closed
6/16/2011	5:33:55 PM	SiCl4 post valve closed
6/16/2011	5:33:55 PM	Bubbler valve closed
6/16/2011	5:33:55 PM	Helium valve opened
6/16/2011	5:33:55 PM	Main Vac valve opened
6/16/2011	5:33:55 PM	Bypass valve opened
6/16/2011	5:33:55 PM	Helium MFC set to  100.000000
6/16/2011	5:33:55 PM	H2 MFC set to  0.000000
6/16/2011	5:33:55 PM	BCl3 MFC set to  0.000000
6/16/2011	5:33:55 PM	PHl3 MFC set to  0.000000
6/16/2011	5:33:55 PM	SiCl4 MFC set to  0.000000
6/16/2011	5:33:55 PM	Bypass solenoid MFC set to  0.000000
6/16/2011	5:33:55 PM	Tube furnace set to 0
6/16/2011	5:34:55 PM	Helium valve closed
6/16/2011	5:34:55 PM	H2 valve closed
6/16/2011	5:34:55 PM	BCl3 valve closed
6/16/2011	5:34:55 PM	PH3 valve closed
6/16/2011	5:34:55 PM	SiCl4 pre valve closed
6/16/2011	5:34:55 PM	SiCl4 post valve closed
6/16/2011	5:34:55 PM	Bubbler valve closed
6/16/2011	5:34:55 PM	Main Vac valve opened
6/16/2011	5:34:55 PM	Bypass valve opened
6/16/2011	5:34:55 PM	Helium MFC set to  0.000000
6/16/2011	5:34:55 PM	H2 MFC set to  0.000000
6/16/2011	5:34:55 PM	BCl3 MFC set to  0.000000
6/16/2011	5:34:55 PM	PHl3 MFC set to  0.000000
6/16/2011	5:34:55 PM	SiCl4 MFC set to  0.000000
6/16/2011	5:34:55 PM	Bypass solenoid MFC set to  0.000000
6/16/2011	5:34:56 PM	Tube furnace set to 0
6/16/2011	5:35:37 PM	Run aborted at 5:35 PM
6/16/2011	5:35:37 PM	Helium valve closed
6/16/2011	5:35:37 PM	H2 valve closed
6/16/2011	5:35:37 PM	BCl3 valve closed
6/16/2011	5:35:37 PM	PH3 valve closed
6/16/2011	5:35:37 PM	SiCl4 pre valve closed
6/16/2011	5:35:37 PM	SiCl4 post valve closed
6/16/2011	5:35:37 PM	Bypass valve closed
6/16/2011	5:35:37 PM	Main Vac valve closed
6/16/2011	5:35:37 PM	Bubbler valve closed
6/16/2011	5:35:37 PM	Helium MFC set to  0.000000
6/16/2011	5:35:37 PM	H2 MFC set to  0.000000
6/16/2011	5:35:37 PM	BCl3 MFC set to  0.000000
6/16/2011	5:35:37 PM	PHl3 MFC set to  0.000000
6/16/2011	5:35:37 PM	SiCl4 MFC set to  0.000000
6/16/2011	5:35:37 PM	Tube furnace set to 0
6/16/2011	5:35:37 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
6/16/2011	5:37:31 PM	Recipe started at 5:37 PM
6/16/2011	5:37:31 PM	Helium valve closed
6/16/2011	5:37:31 PM	BCl3 valve closed
6/16/2011	5:37:31 PM	PH3 valve closed
6/16/2011	5:37:31 PM	SiCl4 pre valve closed
6/16/2011	5:37:31 PM	SiCl4 post valve closed
6/16/2011	5:37:31 PM	Main Vac valve closed
6/16/2011	5:37:31 PM	Bypass valve closed
6/16/2011	5:37:31 PM	Bubbler valve closed
6/16/2011	5:37:31 PM	H2 valve opened
6/16/2011	5:37:31 PM	Helium MFC set to  0.000000
6/16/2011	5:37:31 PM	H2 MFC set to  500.000000
6/16/2011	5:37:31 PM	BCl3 MFC set to  0.000000
6/16/2011	5:37:31 PM	PHl3 MFC set to  0.000000
6/16/2011	5:37:31 PM	SiCl4 MFC set to  0.000000
6/16/2011	5:37:31 PM	Bypass solenoid MFC set to  0.000000
6/16/2011	5:37:31 PM	Tube furnace set to 200
6/16/2011	5:38:50 PM	Helium valve closed
6/16/2011	5:38:50 PM	BCl3 valve closed
6/16/2011	5:38:50 PM	PH3 valve closed
6/16/2011	5:38:50 PM	SiCl4 pre valve closed
6/16/2011	5:38:50 PM	SiCl4 post valve closed
6/16/2011	5:38:50 PM	Main Vac valve closed
6/16/2011	5:38:50 PM	Bypass valve closed
6/16/2011	5:38:50 PM	H2 valve opened
6/16/2011	5:38:50 PM	Bubbler valve opened
6/16/2011	5:38:50 PM	Helium MFC set to  0.000000
6/16/2011	5:38:50 PM	H2 MFC set to  400.000000
6/16/2011	5:38:50 PM	BCl3 MFC set to  0.000000
6/16/2011	5:38:50 PM	PHl3 MFC set to  0.000000
6/16/2011	5:38:50 PM	SiCl4 MFC set to  0.000000
6/16/2011	5:38:50 PM	Bypass solenoid MFC set to  0.000000
6/16/2011	5:38:51 PM	Tube furnace set to 1000
6/16/2011	5:58:51 PM	Helium valve closed
6/16/2011	5:58:51 PM	BCl3 valve closed
6/16/2011	5:58:51 PM	PH3 valve closed
6/16/2011	5:58:51 PM	SiCl4 pre valve closed
6/16/2011	5:58:51 PM	SiCl4 post valve closed
6/16/2011	5:58:51 PM	Main Vac valve closed
6/16/2011	5:58:51 PM	Bypass valve closed
6/16/2011	5:58:51 PM	H2 valve opened
6/16/2011	5:58:51 PM	Bubbler valve opened
6/16/2011	5:58:51 PM	Helium MFC set to  0.000000
6/16/2011	5:58:51 PM	H2 MFC set to  500.000000
6/16/2011	5:58:51 PM	BCl3 MFC set to  0.000000
6/16/2011	5:58:51 PM	PHl3 MFC set to  0.000000
6/16/2011	5:58:51 PM	SiCl4 MFC set to  0.000000
6/16/2011	5:58:51 PM	Bypass solenoid MFC set to  0.000000
6/16/2011	5:58:51 PM	Tube furnace set to 1000
6/16/2011	6:18:51 PM	H2 valve closed
6/16/2011	6:18:51 PM	BCl3 valve closed
6/16/2011	6:18:51 PM	PH3 valve closed
6/16/2011	6:18:51 PM	SiCl4 pre valve closed
6/16/2011	6:18:51 PM	SiCl4 post valve closed
6/16/2011	6:18:51 PM	Main Vac valve closed
6/16/2011	6:18:51 PM	Bypass valve closed
6/16/2011	6:18:51 PM	Helium valve opened
6/16/2011	6:18:51 PM	Bubbler valve opened
6/16/2011	6:18:51 PM	Helium MFC set to  500.000000
6/16/2011	6:18:51 PM	H2 MFC set to  0.000000
6/16/2011	6:18:51 PM	BCl3 MFC set to  0.000000
6/16/2011	6:18:51 PM	PHl3 MFC set to  0.000000
6/16/2011	6:18:51 PM	SiCl4 MFC set to  0.000000
6/16/2011	6:18:51 PM	Bypass solenoid MFC set to  0.000000
6/16/2011	6:18:51 PM	Tube furnace set to 0
6/16/2011	6:38:51 PM	Helium valve closed
6/16/2011	6:38:51 PM	H2 valve closed
6/16/2011	6:38:51 PM	BCl3 valve closed
6/16/2011	6:38:51 PM	PH3 valve closed
6/16/2011	6:38:51 PM	SiCl4 pre valve closed
6/16/2011	6:38:51 PM	SiCl4 post valve closed
6/16/2011	6:38:51 PM	Main Vac valve closed
6/16/2011	6:38:51 PM	Bypass valve closed
6/16/2011	6:38:51 PM	Bubbler valve closed
6/16/2011	6:38:51 PM	Helium MFC set to  0.000000
6/16/2011	6:38:51 PM	H2 MFC set to  0.000000
6/16/2011	6:38:51 PM	BCl3 MFC set to  0.000000
6/16/2011	6:38:51 PM	PHl3 MFC set to  0.000000
6/16/2011	6:38:51 PM	SiCl4 MFC set to  0.000000
6/16/2011	6:38:51 PM	Bypass solenoid MFC set to  0.000000
6/16/2011	6:38:51 PM	Tube furnace set to 0
6/16/2011	6:38:52 PM	Run finished at 6:38 PM
6/16/2011	6:47:58 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/16/2011	6:47:59 PM	Recipe started at 6:47 PM
6/16/2011	6:47:59 PM	Helium valve closed
6/16/2011	6:47:59 PM	H2 valve closed
6/16/2011	6:47:59 PM	BCl3 valve closed
6/16/2011	6:47:59 PM	PH3 valve closed
6/16/2011	6:47:59 PM	SiCl4 pre valve closed
6/16/2011	6:47:59 PM	SiCl4 post valve closed
6/16/2011	6:47:59 PM	Main Vac valve closed
6/16/2011	6:47:59 PM	Bubbler valve closed
6/16/2011	6:47:59 PM	Bypass valve opened
6/16/2011	6:47:59 PM	Helium MFC set to  0.000000
6/16/2011	6:47:59 PM	H2 MFC set to  0.000000
6/16/2011	6:47:59 PM	BCl3 MFC set to  0.000000
6/16/2011	6:47:59 PM	PHl3 MFC set to  0.000000
6/16/2011	6:47:59 PM	SiCl4 MFC set to  0.000000
6/16/2011	6:47:59 PM	Bypass solenoid MFC set to  0.000000
6/16/2011	6:47:59 PM	Tube furnace set to 0
6/16/2011	6:48:29 PM	Helium valve closed
6/16/2011	6:48:29 PM	H2 valve closed
6/16/2011	6:48:29 PM	BCl3 valve closed
6/16/2011	6:48:29 PM	PH3 valve closed
6/16/2011	6:48:29 PM	SiCl4 pre valve closed
6/16/2011	6:48:29 PM	SiCl4 post valve closed
6/16/2011	6:48:29 PM	Bubbler valve closed
6/16/2011	6:48:29 PM	Main Vac valve opened
6/16/2011	6:48:29 PM	Bypass valve opened
6/16/2011	6:48:29 PM	Helium MFC set to  0.000000
6/16/2011	6:48:29 PM	H2 MFC set to  0.000000
6/16/2011	6:48:29 PM	BCl3 MFC set to  0.000000
6/16/2011	6:48:29 PM	PHl3 MFC set to  0.000000
6/16/2011	6:48:29 PM	SiCl4 MFC set to  0.000000
6/16/2011	6:48:29 PM	Bypass solenoid MFC set to  0.000000
6/16/2011	6:48:29 PM	Tube furnace set to 0
6/16/2011	6:48:29 PM	Run finished at 6:48 PM
6/16/2011	6:48:29 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
